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Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition.
Lee, Seunghwan; Park, Yonggyun; Liu, Pengzhan; Kim, Muyoung; Kim, Hyeong-U; Kim, Taesung.
Afiliação
  • Lee S; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
  • Park Y; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
  • Liu P; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
  • Kim M; Department of Plasma Engineering, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea.
  • Kim HU; Department of Plasma Engineering, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea.
  • Kim T; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
Sensors (Basel) ; 23(19)2023 Oct 02.
Article em En | MEDLINE | ID: mdl-37837056
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sensors (Basel) Ano de publicação: 2023 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sensors (Basel) Ano de publicação: 2023 Tipo de documento: Article