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Thickness measurement of nm HfO2 films.
Kim, K J; Kim, A; Kim, C S; Song, S W; Ruh, H; Unger, W E S; Radnik, J; Mata-Salazar, J; Juarez-Garcia, J M; Cortazar-Martinez, O; Herrera-Gomez, A; Hansen, P E; Madesen, J S; Senna, C A; Archanjo, B S; Damasceno, J C; Achete, C A; Wang, H; Wang, M; Windover, D; Steel, E; Kurokawa, A; Fujimoto, T; Azuma, Y; Terauchi, S; Zhang, L; Jordaan, W A; Spencer, S J; Shard, A G; Koenders, L; Krumrey, M; Busch, I; Jeynes, C.
Afiliação
  • Kim KJ; KRISS, Daejeon, Korea.
  • Kim A; KRISS, Daejeon, Korea.
  • Kim CS; KRISS, Daejeon, Korea.
  • Song SW; KRISS, Daejeon, Korea.
  • Ruh H; KRISS, Daejeon, Korea.
  • Unger WES; BAM, Berlin, Germany.
  • Radnik J; BAM, Berlin, Germany.
  • Mata-Salazar J; CENAM, Queretaro, Mexico.
  • Juarez-Garcia JM; CENAM, Queretaro, Mexico.
  • Cortazar-Martinez O; CINVES TAV, Queretaro, Mexico.
  • Herrera-Gomez A; CINVES TAV, Queretaro, Mexico.
  • Hansen PE; DFM, Hørsholm, Denmark.
  • Madesen JS; DFM, Hørsholm, Denmark.
  • Senna CA; INMETRO, Rio De Janeiro, Brazil.
  • Archanjo BS; INMETRO, Rio De Janeiro, Brazil.
  • Damasceno JC; INMETRO, Rio De Janeiro, Brazil.
  • Achete CA; INMETRO, Rio De Janeiro, Brazil.
  • Wang H; NIM, Beijing, China.
  • Wang M; NIM, Beijing, China.
  • Windover D; NIST, Gaithersburg, USA.
  • Steel E; NIST, Gaithersburg, USA.
  • Kurokawa A; NMIJ, Tsukuba, Japan.
  • Fujimoto T; NMIJ, Tsukuba, Japan.
  • Azuma Y; NMIJ, Tsukuba, Japan.
  • Terauchi S; NMIJ, Tsukuba, Japan.
  • Zhang L; NMIJ, Tsukuba, Japan.
  • Jordaan WA; NMISA, Pretoria, South Africa.
  • Spencer SJ; NPL, Teddington, UK.
  • Shard AG; NPL, Teddington, UK.
  • Koenders L; PTB, Braunschweig and Berlin, Germany.
  • Krumrey M; PTB, Braunschweig and Berlin, Germany.
  • Busch I; PTB, Braunschweig and Berlin, Germany.
  • Jeynes C; University of Surrey Ion Beam Centre, Guildford, UK.
Metrologia ; 58(1A)2021.
Article em En | MEDLINE | ID: mdl-38883307
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Metrologia Ano de publicação: 2021 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Metrologia Ano de publicação: 2021 Tipo de documento: Article