Highly Stretchable, Knittable, Wearable Fiberform Hydrovoltaic Generators Driven by Water Transpiration for Portable Self-Power Supply and Self-Powered Strain Sensor.

The development of excellently stretchable, highly mobile, and sustainable power supplies is of great importance for self-power wearable electronics. Transpiration-driven hydrovoltaic power generator (HPG) has been demonstrated to be a promising energy harvesting strategy with the advantages of negative heat and zero-carbon emissions. Herein, this work demonstrates a fiber-based stretchable HPG with the advantages of high output, portability, knittability, and sustainable power generation. Based on the functionalized micro-nano water diffusion channels constructed by the discarded mask straps (MSs) and oxidation-treated carbon nanomaterials, the applied water can continuously produce electricity during the spontaneous flow and diffusion. Experimentally, when a tiny 0.1 mL of water encounters one end of the proposed HPG, the centimeter-length device can yield a peak voltage of 0.43 V, peak current of 29.5 µA, and energy density of 5.833 mW h cm-3. By efficiently integrating multiple power generation units, sufficient output power can be provided to drive commercial electronic devices even in the stretched state. Furthermore, due to the reversibility of the electrical output during dynamic stretching-releasing, it can passively convert physiological activities and motion behaviors into quantifiable and processable current signals, opening up HPG's application in the field of self-powered wearable sensing.

In-situ determination of spin polarization in a single-beam fiber-coupled spin-exchange-relaxation-free atomic magnetometer with differential detection.

The electronic spin polarization of alkali-metal-vapor atoms is a pivotal parameter for atomic magnetometers. Herein, a novel method is presented for determining the spin polarization with a miniaturized single-beam spin-exchange-relaxation-free (SERF) magnetometer on the basis of zero-field cross-over resonance. Two separate laser beams are utilized to heat the cell and interrogate the vapor atoms, respectively. Spin polarization can be extracted by measuring the resonance response signal of the magnetometer to the transverse magnetic field under different irradiances. Results of these experiments are consistent well with the theoretical predictions with the maximum deviation less than 4%. The proposed method has the integrated advantages of possessing a simple configuration and in-situ measurement. Furthermore, combined with a homemade optical differential detection system with a factor of approximately three of the power noise suppression, the developed single-beam SERF atomic magnetometer with a measuring sensitivity of 32 fT/Hz1/2 has been achieved. This demonstrated approach can help guide the development of chip-scale atomic magnetometers for bio-magnetic field imaging applications.

All electrospun fabrics based piezoelectric tactile sensor.

Tactile sensors have been widely used in the areas of health monitoring and intelligent human-machine interface. Flexible tactile sensors based on nanofiber mats made by electrospinning can meet the requirements of comfortability and breathability for wearing the body very well. Here, we developed a flexible and self-powered tactile sensor that was sandwich assembled by electrospun organic electrodes and a piezoelectric layer. The metal-free organic electrodes of thermal plastic polyurethane (PU) nanofibers decorated with multi-walled carbon nanotubes were fabricated by electrospinning followed by ultrasonication treatment. The electrospun polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) mat was utilized as the piezoelectric layer, and it was found that the piezoelectric performance of PVDF-TrFE nanofiber mat added with barium titanate (BaTiO3) nanoparticles was enhanced about 187% than that of the pure PVDF-TrFE nanofiber mat. For practical application, the as-prepared piezoelectric tactile sensor exhibited an approximative linear relationship between the external force and the electrical output. Then the array of fabricated sensors was attached to the fingertips of a glove to grab a cup of water for tactile sensing, and the mass of water can be directly estimated according to the outputs of the sensor array. Attributed to the integrated merits of good flexibility, enhanced piezoelectric performance, light weight, and efficient gas permeability, the developed tactile sensor could be widely used as wearable devices for robot execution end or prosthesis for tactile feedback.

Au-assisted polymerization of conductive poly(N-phenylglycine) as high-performance positive electrodes for asymmetric supercapacitors.

Herein, a novel conductive poly(N-phenylglycine) (PNPG) polymer was successfully prepared, byin situelectrochemical polymerization method (+0.75 VversusAg/AgCl) for 10 min, on flexible stainless-steel plate coated with a thin Au film (Au/SS) to serve as a binder-free pseudocapacitive PNPG/Au/SS electrode for energy storage devices. Compared to the electrode without Au coating, PNPG/Au/SS electrode exhibited better electrochemical performance with larger specific capacitance (495 F g-1at a current density of 2 A g-1), higher rate performance and lower resistance, which are good indications to act as a positive electrode for asymmetric supercapacitor devices. Combined with activated carbon as a negative electrode, an asymmetric supercapacitor device was constructed. It displayed a specific capacitance of 38 F g-1at a current density of 0.5 A g-1and an energy density of 5.3 Wh kg-1at a power density of 250 W kg-1. Experimentally, two asymmetric supercapacitor devices were connected in series to power a home-made windmill continuously for 8 s, revealing the high potential of this novel conductive polymer material for energy storage application.

A flexible electrostatic nanogenerator and self-powered capacitive sensor based on electrospun polystyrene mats and graphene oxide films.

Electrostatic nanogenerators or capacitive sensors that leverage electrostatic induction for power generation or sensing, has attracted significant interests due to their simple structure, ease of fabrication, and high device stability. However, in order for such devices to work, an additional power source or a post-charging process is necessary to activate the electrostatic effect. In this work, an electrostatic nanogenerator is fabricated using electrospun polystyrene (PS) mats and dip-coated graphene oxide (GO) films as the self-charged components. The electret performances of the PS mats and GO films are characterized via the electrostatic force microscopy phase shift and surface potential measurements. With a multilayer device structure that consists of top electrodes/GO films/spacer/electrospun PS mats/bottom electrodes, the resultant device acts as an electrostatic generator that operates in the noncontact mode. The nanogenerator can output a peak voltage of ca. 6.41 V and a peak current of ca. 6.57 nA at a rate of 1 Hz of mechanical compression, and with no attenuation of electrical outputs even after 50 000 cycles over a 13 h period. Furthermore, this as-prepared device is also capable of serving as a self-powered capacitive sensor for detection of tiny mechanical impacts and measurement of human finger bending. This results of this work provides a new avenue to easily fabricate electrostatic nanogenerators with high durability and self-powered capacitive sensors for the detection of small impacts.

Gelatin methacryloyl-based tactile sensors for medical wearables.

Gelatin methacryloyl (GelMA) is a widely used hydrogel with skin-derived gelatin acting as the main constituent. However, GelMA has not been used in the development of wearable biosensors, which are emerging devices that enable personalized healthcare monitoring. This work highlights the potential of GelMA for wearable biosensing applications by demonstrating a fully solution-processable and transparent capacitive tactile sensor with microstructured GelMA as the core dielectric layer. A robust chemical bonding and a reliable encapsulation approach are introduced to overcome detachment and water-evaporation issues in hydrogel biosensors. The resultant GelMA tactile sensor shows a high-pressure sensitivity of 0.19 kPa-1 and one order of magnitude lower limit of detection (0.1 Pa) compared to previous hydrogel pressure sensors owing to its excellent mechanical and electrical properties (dielectric constant). Furthermore, it shows durability up to 3000 test cycles because of tough chemical bonding, and long-term stability of 3 days due to the inclusion of an encapsulation layer, which prevents water evaporation (80% water content). Successful monitoring of various human physiological and motion signals demonstrates the potential of these GelMA tactile sensors for wearable biosensing applications.

Ultrasensitive SERF atomic magnetometer with a miniaturized hybrid vapor cell.

The chip-scale hybrid optical pumping spin-exchange relaxation-free (SERF) atomic magnetometer with a single-beam arrangement has prominent applications in biomagnetic measurements because of its outstanding features, including ultrahigh sensitivity, an enhanced signal-to-noise ratio, homogeneous spin polarization and a much simpler optical configuration than other devices. In this work, a miniaturized single-beam hybrid optical pumping SERF atomic magnetometer based on a microfabricated atomic vapor cell is demonstrated. Although the optically thin Cs atoms are spin-polarized, the dense Rb atoms determine the experimental results. The enhanced signal strength and narrowed resonance linewidth are experimentally proven, which shows the superiority of the proposed magnetometer scheme. By using a differential detection scheme, we effectively suppress optical noise with an approximate five-fold improvement. Moreover, the cell temperature markedly affects the performance of the magnetometer. We systematically investigate the effects of temperature on the magnetometer parameters. The theoretical basis for these effects is explained in detail. The developed miniaturized magnetometer has an optimal magnetic sensitivity of 20 fT/Hz1/2. The presented work provides a foundation for the chip-scale integration of ultrahighly sensitive quantum magnetometers that can be used for forward-looking magnetocardiography (MCG) and magnetoencephalography (MEG) applications.

Fabrication and characterization of high-sensitivity, wide-range, and flexible MEMS thermal flow velocity sensors.

With the rapid development of various fields, including aerospace, industrial measurement and control, and medical monitoring, the need to quantify flow velocity measurements is increasing. It is difficult for traditional flow velocity sensors to fulfill accuracy requirements for velocity measurements due to their small ranges, susceptibility to environmental impacts, and instability. Herein, to optimize sensor performance, a flexible microelectromechanical system (MEMS) thermal flow sensor is proposed that combines the working principles of thermal loss and thermal temperature difference and utilizes a flexible cavity substrate made of a low-thermal-conductivity polyimide/SiO2 (PI/SiO2) composite porous film to broaden the measurement range and improve the sensitivity. The measurement results show that the maximum measurable flow velocity can reach 30 m/s with a resolution of 5.4 mm/s. The average sensitivities of the sensor are 59.49 mV/(m s-1) in the medium-to-low wind velocity range of 0-2 m/s and 467.31 mV/(m s-1) in the wind velocity range of 2-30 m/s. The sensor proposed in this work can enable new applications of flexible flow sensors and wearable devices.

Facile assembly of flexible, stretchable and attachable symmetric microsupercapacitors with wide working voltage windows and favorable durability.

With the increasing development of intelligent robots and wearable electronics, the demand for high-performance flexible energy storage devices is drastically increasing. In this study, flexible symmetric microsupercapacitors (MSCs) that could operate in a wide working voltage window were developed by combining laser-direct-writing graphene (LG) electrodes with a phosphoric acid-nonionic surfactant liquid crystal (PA-NI LC) gel electrolyte. To increase the flexibility and enhance the conformal ability of the MSC devices to anisotropic surfaces, after the interdigitated LG formed on the polyimide (PI) film surface, the devices were further transferred onto a flexible, stretchable and transparent polydimethylsiloxane (PDMS) substrate; this substrate displayed favorable flexibility and mechanical characteristics in the bending test. Furthermore, the electrochemical performances of the symmetric MSCs with various electrode widths (300, 400, 500 and 600 µm) were evaluated. The findings revealed that symmetric MSC devices could operate in a large voltage range (0-1.5 V); additionally, the device with a 300 µm electrode width (MSC-300) exhibited the largest areal capacitance of 2.3 mF cm-2 at 0.07 mA cm-2 and an areal (volumetric) energy density of 0.72 µWh cm- 2 (0.36 mWh cm- 3) at 55.07 µW cm-2 (27.54 mW cm-3), along with favorable mechanical and cycling stability. After charging for ~20 s, two MSC-300 devices connected in series could supply energy to a calculator to operate for ~130 s, showing its practical application potential as an energy storage device. Moreover, the device displayed favorable reversibility, stability and durability. After 12 months of aging in air at room temperature, its electrochemical performance was not altered, and after charging-discharging measurements for 5000 cycles at 0.07 mA cm-2, ~93.6% of the areal capacitance was still retained; these results demonstrated its practical long-term application potential as an energy storage device.

Sensitive, Robust, Wide-Range, and High-Consistency Capacitive Tactile Sensors with Ordered Porous Dielectric Microstructures.

Flexible capacitive tactile sensors show great promise in personalized healthcare monitoring and human-machine interfaces, but their practical application is normally hindered because they rarely possess the required comprehensive performance, that is, high pressure sensitivity and fast response within a broad pressure range, high structure robustness, performance consistency, etc. This paper aims to engineer flexible capacitive pressure sensors with highly ordered porous dielectric microstructures and a 3D-printing-based fully solution-processable fabrication process. The proposed dielectric layer with uniformly distributed interior microporous can not only increase its compressibility and dynamic response within an extended pressure range but also enlarge its contact area with electrodes, contributing to a simultaneous improvement in the sensitivity, response speed, detection range, and structure robustness. Meanwhile, owing to its superior abilities in complex structure manufacturing and dimension controlling, the proposed 3D-printing-based fabrication process enables the consistent fabrication of the porous microstructure and thus guarantees device consistency. As a result, the prepared pressure sensors exhibit a high sensitivity of 0.21 kPa-1, fast response and relaxation times of 112 and 152 ms, an interface bonding strength of more than 455.2 kPa, and excellent performance consistency (≤5.47% deviation among different batches of sensors) and tunability. Encouraged by this, the pressure sensor is further integrated with a wireless readout circuit and realizes wireless wearable monitoring of various biosignals (pulse waves and heart rate) and body movements (from slight finger touch to large knee bending). Finally, the influence law of the feature parameters of the porous microstructure on device performance is established by the finite element method, paving the way for sensor optimization. This study motivates the development of flexible capacitive pressure sensors toward practical application.

Highly sensitive piezoresistive and thermally responsive fibrous networks from the in situ growth of PEDOT on MWCNT-decorated electrospun PU fibers for pressure and temperature sensing.

Flexible electronics have demonstrated various strategies to enhance the sensory ability for tactile perception and wearable physiological monitoring. Fibrous microstructures have attracted much interest because of their excellent mechanical properties and fabricability. Herein, a structurally robust fibrous mat was first fabricated by electrospinning, followed by a sequential process of functionalization utilizing ultrasonication treatment and in situ polymerization growth. Electrospun polyurethane (PU) microfibers were anchored with multi-walled carbon nanotubes (MWCNTs) to form conductive paths along each fiber by a scalable ultrasonic cavitation treatment in an MWCNT suspension. After, a layer of poly(3,4-ethylene dioxythiophene) (PEDOT) was grown on the surface of PU fibers decorated with MWCNTs to enhance the conductive conjunctions of MWCNTs. Due to the superior electromechanical behaviors and mechanical reinforcement of PEDOT, the PEDOT/MWCNT@PU mat-based device exhibits a wide working range (0-70 kPa), high sensitivity (1.6 kPa-1), and good mechanical robustness (over 18,000 cycles). The PEDOT/MWCNT@PU mat-based sensor also demonstrates a good linear response to different temperature variations because of the thermoelectricity of the PEDOT/MWCNT composite. This novel strategy for the fabrication of multifunctional fibrous mats provides a promising opportunity for future applications for high-performance wearable devices.

A highly electrocatalytic, stretchable, and breathable enzyme-free electrochemical patch based on electrospun fibers decorated with platinum nano pine needles for continuous glucose sensing in neutral conditions.

Given the worldwide increase in diabetes, there is an urgent need for glucose sensors that can achieve the on-body detection of glucose concentration. With the development of nanomaterials and flexible electronics, wearable electrochemical enzyme-free glucose biosensors that can conveniently, continuously and stably monitor the glucose concentrations of diabetes patients without invasion and risk of infection are coming into focus. However, despite the enormous efforts toward wearable electrochemical enzyme-free glucose sensors, there have been limited achievements in developing a stretchable and breathable glucose sensor with high sensitivity, low detection limit, and excellent catalytic activity towards glucose oxidation in neutral media, to meet the need for continuous wearable glucose monitoring in scenarios such as the on-body detection of glucose in human sweat. Herein, we demonstrate a novel electrochemical enzyme-free glucose-sensing patch on the foundation of electrospun polyurethane (PU) fibrous mats to address some of the aforementioned challenges. The sensing patch was fabricated through a facile technology of electrospinning, followed by magnetron sputtering of gold (Au) to enable high conductivity. After that, ultrasonic-assisted electrodeposition was utilized to in situ introduce well-dispersed platinum nano pine needles along each fiber. Due to the good stretchability of PU materials, porous structure, and large specific surface area of electrochemical sites, the glucose-sensing patch promises merits such as good stretchability (performs well under 10% strain), high sensitivity (203.13 µA mM-1 cm-1), prominently low detection limit (14.77 µM), excellent selectivity, and efficient vapor permeability. Notably, the advanced hierarchical nanostructures with excellent catalytic activity towards glucose oxidation could be capable of detecting glucose in neutral conditions (pH = 7.4) without the assistance of enzymes. Given the facile fabrication methods and the integrated superior performances, this enzyme-free glucose-sensing patch could play a vital role in wearable glucose sensors.

Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers.

Ultrasonic fluid bubble detection is important in industrial controls, aerospace systems and clinical medicine because it can prevent fatal mechanical failures and threats to life. However, current ultrasonic technologies for bubble detection are based on conventional bulk PZT-based transducers, which suffer from large size, high power consumption and poor integration with ICs and thus are unable to implement real-time and long-term monitoring in tight physical spaces, such as in extracorporeal membrane oxygenation (ECMO) systems and dialysis machines or hydraulic systems in aircraft. This work highlights the prospect of capacitive micromachined ultrasonic transducers (CMUTs) in the aforementioned application situations based on the mechanism of received voltage variation caused by bubble-induced acoustic energy attenuation. The corresponding theories are established and well validated using finite element simulations. The fluid bubbles inside a pipe with a diameter as small as 8 mm are successfully measured using our fabricated CMUT chips with a resonant frequency of 1.1 MHz. The received voltage variation increases significantly with increasing bubble radii in the range of 0.5-2.5 mm. Further studies show that other factors, such as bubble positions, flow velocities, fluid medium types, pipe thicknesses and diameters, have negligible effects on fluid bubble measurement, demonstrating the feasibility and robustness of the CMUT-based ultrasonic bubble detection technique.

Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids.

A micromachined resonator immersed in liquid provides valuable resonance parameters for determining the fluidic parameters. However, the liquid operating environment poses a challenge to maintaining a fine sensing performance, particularly through electrical characterization. This paper presents a piezoelectric micromachined cantilever with a stepped shape for liquid monitoring purposes. Multiple modes of the proposed cantilever are available with full electrical characterization for realizing self-actuated and self-sensing capabilities. The focus is on higher flexural resonances, which nonconventionally feature two-dimensional vibration modes. Modal analyses are conducted for the developed cantilever under flexural vibrations at different orders. Modeling explains not only the basic length-dominant mode but also higher modes that simultaneously depend on the length and width of the cantilever. This study determines that the analytical predictions for resonant frequency in liquid media exhibit good agreement with the experimental results. Furthermore, the experiments on cantilever resonators are performed in various test liquids, demonstrating that higher-order flexural modes allow for the decoupled measurements of density and viscosity. The measurement differences achieve 0.39% in density and 3.50% in viscosity, and the frequency instability is below 0.05‰. On the basis of these results, design guidelines for piezoelectric higher-mode resonators are proposed for liquid sensing.

Facile Assembly of Hybrid Micro-Supercapacitors for a Sunlight-Powered Energy Storage System.

Herein, hybrid micro-supercapacitors (MSCs), consisting of positive CoNi layer double hydroxides (LDHs) decorated on carbon nanotubes (CoNi LDHs@CNTs) and negative CNT electrodes, were assembled by facile drop-coated and electrodeposition methods. The as-fabricated MSCs were optimized in view of electrochemical performance, and the CoNi LDHs-2@CNTs//CNT MSC exhibited a favorable performance and was thus chosen to be the candidate for MSC device package. The packaged CoNi LDHs-2@CNTs//CNT MSC demonstrated a large areal capacitance of 11.0 mF·cm-2 at a current density of 0.08 mA·cm-2, a good rate performance (56% areal capacitance retained at a higher current density of 0.4 mA·cm-2), and a favorable cycling stability and reversibility (92% of the original areal capacitance was retained after 5000 cycles). Furthermore, the MSC device recorded an energy density of 1.5 µWh·cm-2 at a power density of 42.5 µW·cm-2 and was successfully applied for the storage of energy supplied by solar cells to operate a red light-emitting diode. All these findings demonstrated the promising practical energy storage application of the as-fabricated hybrid MSC devices in the construction of sunlight-powered energy storage systems.

Equivalent Circuit Model for a Large Array of Coupled Piezoelectric Micromachined Ultrasonic Transducers With High Emission Performance.

In this article, an analytical equivalent circuit model is established for the piezoelectric micromachined ultrasonic transducer (PMUT) cell and array with a combination of the annular and circular diaphragms used for structural optimization and complex array design. Based on this model, a comprehensive analysis is conducted on the acoustic-structural coupling of an annular and circular diaphragm-coupled PMUT (AC-PMUT) with a new excitation method. The model-derived results are in good agreement with the simulation and experimental results. Then, an optimized design has been presented to achieve high-output pressure and a good array working performance. In summary, a comparison of the array working performance is conducted between the arrays that consist of AC-PMUTs and traditional circular diaphragm PMUTs (C-PMUTs). The results indicate that the AC-PMUT array has a much lower crosstalk effect than that of the traditional C-PMUT array. By this means, the AC-PMUT array can fully use the high vibration amplitude achieved by each AC-PMUT cell to improve its output ability. As a result, the highest ultrasonic output pressure generated by the AC-PMUT array in its resonant condition can achieve an increase of 155%, compared with that generated by the C-PMUT array.

Closed-Form Expressions on CMUTs With Layered Anisotropic Microplates Under Residual Stress and Pressure.

Capacitive micromachined ultrasonic transducers (CMUTs) are promising in the emerging fields of personalized ultrasonic diagnostics, therapy, and noninvasive 3-D biometric. However, previous theories describing their mechanical behavior rarely consider multilayer and anisotropic material properties, resulting in limited application and significant analysis errors. This article proposes closed-form expressions for the static deflection, collapse voltage, and resonant frequency of circular-microplate-based CMUTs, which consider both the aforementioned properties as well as the effects of residual stress and hydrostatic pressure. These expressions are established by combining the classical laminated thin plate (CLTP) theory, Galerkin method, a partial expansion approach for electrostatic force, and an energy equivalent method. A parametric study based on finite-element method simulations shows that considering the material anisotropy can significantly improve analysis accuracy (~25 times higher than the theories neglecting the material anisotropy). These expressions maintain accuracy across almost the whole working voltage range (up to 96% of collapse voltages) and a wide dimension range (diameter-to-thickness ratios of 20-80 with gap-to-thickness ratios of ≤2). Furthermore, their utility in practical applications is well verified using numerical results based on more realistic boundary conditions and experimental results of CMUT chips. Finally, we demonstrate that the high accuracy of these expressions at thickness-comparable deflection results from the extended applicable deflection range of the CLTP theory when it is used for electrostatically actuated microplates.

Array Design of Piezoelectric Micromachined Ultrasonic Transducers With Low-Crosstalk and High-Emission Performance.

This article presents a resonant cavity-based array design for piezoelectric micromachined ultrasonic transducers (PMUTs). The cavity depth is designed to ensure that its open end achieves a considerably smaller acoustic impedance than the surrounding PMUT cells. The interference acoustic wave generated between every two adjacent PMUT cells at the near surface of the array will take an easy path down to the cavity bottom. As such, the crosstalk effect among different adjacent cells in the array can be largely reduced. An equivalent circuit model of the proposed array is established for its design and optimization. In addition, the solutions for circuit parameters in the electromechanical domain are analytically derived and verified via FEM simulations. Given the low crosstalk effect achieved by the proposed array design, the output sensitivity of the proposed PMUTs can be improved by 259% compared with the traditional PMUTs with a high distribution density of the same size. The cavity-based array design and its model can be used for further advanced PMUT cell structures in other arrays to improve their performance.

Novel high-performance piezoresistive shock accelerometer for ultra-high-g measurement utilizing self-support sensing beams.

This study describes the design and implementation of a novel high-performance piezoresistive accelerometer for the measurement of shock acceleration of up to 100 000 g. The structure of the accelerometer sensing chip was implemented with piezoresistive self-support beams. The piezoresistors were made in piezoresistive sensing micro-beams, which were independent of support beams, to weaken the correlation between measuring sensitivity and resonant frequency. In this way, the measuring sensitivity of the proposed novel piezoresistive accelerometer could be increased without sacrificing resonant frequency. The optimization of structural dimensions of the sensing chip was conducted through finite element method simulations. The sensing chip was fabricated employing bulk-micromachining technology with a silicon-on-insulator wafer. The fabricated accelerometer was encapsulated in stainless shell and evaluated using the Hopkinson bar system. Results demonstrated the proposed accelerometer with the measuring sensitivity of 0.54 µV/g/V and the resonant frequency of 445 kHz.

Equivalent Circuit Models of Cell and Array for Resonant Cavity-Based Piezoelectric Micromachined Ultrasonic Transducer.

This article presents a design of resonant cavity-based piezoelectric micromachined ultrasonic transducers (PMUTs), including impedance matching tube-integrated (T) and Helmholtz resonant (HR) cavity-integrated PMUTs. In addition, equivalent circuit models for single PMUT cell and PMUT array are developed for structural optimization and complex array design. The model-derived results agree well with the FEM results. On the basis of the proposed models, an optimized design is established to achieve high output pressure and a good array working performance. The working performance of arrays that consist of HR-PMUTs and traditional circular diaphragm PMUTs (C-PMUTs) is compared. Results indicate that the HR-PMUT array has a lower crosstalk effect than the traditional C-PMUT array. Furthermore, the highest ultrasonic output pressure of HR-PMUT array at the resonant frequency can be achieved with an increase of up to 163% compared with that of the C-PMUT array because of the liquid amplification effect. Also, the cavity-based design and its model can be used for further advanced PMUT cell structures in other arrays to improve their performance.