Catalytic Scanning Probe Nanolithography (cSPL): Control of the AFM Parameters in Order to Achieve Sub-100-nm Spatially Resolved Epoxidation of Alkenes Grafted onto a Surface.

Scanning probe lithography (SPL) appears to be a reliable alternative to the use of masks in traditional lithography techniques as it offers the possibility of directly producing specific chemical functionalities with nanoscale spatial control. We have recently extend the range of applications of catalytic SPL (cSPL) by introducing a homogeneous catalyst immobilized on the apex of a scanning probe. Here we investigate the importance of atomic force microscopy (AFM) physical parameters (applied force, writing speed, and interline distance) on the resultant chemical activity in this cSPL methodology through the direct topographic observation of nanostructured surfaces. Indeed, an alkene-terminated self-assembled monolayer (alkene-SAM) on a silicon wafer was locally epoxidized using a scanning probe tip with a covalently grafted manganese complex bearing the 1,4,7-triazacyclononane macrocycle as the ligand. In a post-transformation process, N-octylpiperazine was covalently grafted to the surface via a selective nucleophilic ring-opening reaction. With this procedure, we could write various patterns on the surface with high spatial control. The catalytic AFM probe thus appears to be very robust because a total area close to 500 µm(2) was patterned without any noticeable loss of catalytic activity. Finally, this methodology allowed us to reach a lower lateral line resolution down to 40 nm, thus being competitive and complementary to the other nanolithographical techniques for the nanostructuration of surfaces.

Spatially resolved acyl transfer on surface by organo-catalytic scanning probe nanolithography (o-cSPL).

Groundbreaking research done in the area of nanolithography makes it a versatile tool to produce nanopatterns for a broad range of chemical surface functionalization or physical modifications. We report for the first time an organocatalytic scanning probe nanolithography (o-cSPL) approach. Covalent binding of an organocatalyst on the apex of an atomic force microscope (AFM) tip gives way to a system that allows the formation of locally defined acylated-alcohol patterns on self-assembled monolayers (SAMs). With resolutions comparable to those of other cSPL methods, this first example of o-cSPL holds promise for future applications of bottom-up nanolithography set-ups employing this novel technique.