Line spectroscopic reflectometry for rapid and large-area thickness measurement.

Thickness measurements in the range of 0.1-1 mm over large optically transparent layers are essential in various manufacturing applications. However, existing non-contact measurement methods, which typically measure a single point or a few points at a time, fall short in their suitability for inline area measurement. Here, we introduce line spectroscopic reflectometry (LSR), an approach that extends the point measurement of traditional SR to line measurement, enabling rapid thickness measurement over large areas. By combining line beam illumination and line spectroscopy, LSR can measure 2048 points simultaneously, thereby boosting the measurement speed by two thousand times. We detail the measurement principle and the optical design in the near-infrared regime, and demonstrate thickness measurements of single-layered and double-layered samples over a measurement line length of up to 68 mm. Furthermore, we showcase the inline area measurement capability of LSR through one-dimensional sample scanning, with measurement rates limited only by camera readout rates.

Simple and fast calibration method for phase-only spatial light modulators.

Phase-only spatial light modulators (SLMs) are widely used to engineer the phase of light in various applications. However, liquid-crystal-on-silicon SLMs have undesirable spatial variations in phase response and optical flatness across the SLM panel, which must be compensated for accurate phase control. Here, we introduce a simple and fast way to simultaneously extract these two types of SLM nonuniformities at single-pixel resolution using Twyman-Green interferometry without a piezoelectric transducer. By modulating the interference intensity via the SLM gray level, our approach requires N times fewer interferograms than typical N-step phase shift interferometry (PSI), while providing flatness correction as accurate as PSI. In practice, our calibration method works well with as few as 18 interferograms, which can be quickly acquired without concern for phase drift. We detail the calibration procedure and discuss the performance of our calibration.

Enhancing obSTORM imaging performance with cubic spline PSF modeling.

Oblique plane microscopy-based single molecule localization microscopy (obSTORM) has shown great potential for super-resolution imaging of thick biological specimens. Despite its compatibility with tissues and small animals, prior uses of the Gaussian point spread function (PSF) model have resulted in limited imaging resolution and a narrow axial localization range. This is due to the poor fit of the Gaussian PSF model with the actual PSF shapes in obSTORM. To overcome these limitations, we have employed cubic splines for a more accurate modeling of the experimental PSF shapes. This refined PSF model enhances three-dimensional localization precision, leading to significant improvements in obSTORM imaging of mouse retina tissues, such as an approximately 1.2 times increase in imaging resolution, seamless stitching of single molecules between adjacent optical sections, and a doubling of the sectional interval in volumetric obSTORM imaging due to the extended axial range of usable section thickness. The cubic spline PSF model thus offers a path towards more accurate and faster volumetric obSTORM imaging of biological specimens.