Computer screen photoassisted off-null ellipsometry.
Appl Opt
; 45(30): 7795-9, 2006 Oct 20.
Article
en En
| MEDLINE
| ID: mdl-17068512
ABSTRACT
The ellipsometric measurement of thickness is demonstrated using a computer screen as a light source and a webcam as a detector, adding imaging off-null ellipsometry to the range of available computer screen photoassisted techniques. The results show good qualitative agreement with a simplified theoretical model and a thickness resolution in the nanometer range is achieved. The presented model can be used to optimize the setup for sensitivity. Since the computer screen serves as a homogeneous large area illumination source, which can be tuned to different intensities for different parts of the sample, a large sensitivity range can be obtained without sacrificing thickness resolution.
Buscar en Google
Colección:
01-internacional
Banco de datos:
MEDLINE
Tipo de estudio:
Qualitative_research
Idioma:
En
Revista:
Appl Opt
Año:
2006
Tipo del documento:
Article
País de afiliación:
Suecia