Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO2 Suspended Film.

Liu, Qi; Ding, Guifu; Wang, Yipin; Yao, Jinyuan

Liu, Qi; Ding, Guifu; Wang, Yipin; Yao, Jinyuan.

Afiliación

Liu Q; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China. Liuqi94@sjtu.edu.cn.
Ding G; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China. gfding@sjtu.edu.cn.
Wang Y; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China. yipinwang@sjtu.edu.cn.
Yao J; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China. jyyao@sjtu.edu.cn.

Micromachines (Basel) ; 9(10)2018 Oct 11.

Article en En | MEDLINE | ID: mdl-30424447

Palabras clave

infrared image; power consumption; single-layer SiO2; suspended micro hotplate; temperature uniformity

Texto completo

Imprimir

XML

PubMed Links

Buscar en Google

Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2018 Tipo del documento: Article País de afiliación: China

Texto completo

Imprimir

XML

PubMed Links

Buscar en Google