A Miniature Four-Channel Ion Trap Array Based on Non-silicon MEMS Technology.

Zhang, Qi; Lu, Xichi; Chen, Ting; Xiao, Yu; Yao, Rujiao; Yao, Jinyuan

Zhang, Qi; Lu, Xichi; Chen, Ting; Xiao, Yu; Yao, Rujiao; Yao, Jinyuan.

Afiliación

Zhang Q; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China.
Lu X; Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
Chen T; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China.
Xiao Y; Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
Yao R; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China.
Yao J; Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.

Micromachines (Basel) ; 12(7)2021 Jul 16.

Article en En | MEDLINE | ID: mdl-34357241

Palabras clave

MEMS; mass spectrometry; miniature four-channel ion trap array (MFITA)

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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2021 Tipo del documento: Article País de afiliación: China

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