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Deterministic Shallow Dopant Implantation in Silicon with Detection Confidence Upper-Bound to 99.85% by Ion-Solid Interactions.
Jakob, Alexander M; Robson, Simon G; Schmitt, Vivien; Mourik, Vincent; Posselt, Matthias; Spemann, Daniel; Johnson, Brett C; Firgau, Hannes R; Mayes, Edwin; McCallum, Jeffrey C; Morello, Andrea; Jamieson, David N.
Afiliación
  • Jakob AM; School of Physics, ARC Centre for Quantum Computation and Communication Technology, University of Melbourne, Parkville, VIC, 3010, Australia.
  • Robson SG; School of Physics, ARC Centre for Quantum Computation and Communication Technology, University of Melbourne, Parkville, VIC, 3010, Australia.
  • Schmitt V; School of Electrical Engineering and Telecommunications, ARC Centre for Quantum Computation and Communication Technology, UNSW Sydney, Sydney, NSW, 2052, Australia.
  • Mourik V; School of Electrical Engineering and Telecommunications, ARC Centre for Quantum Computation and Communication Technology, UNSW Sydney, Sydney, NSW, 2052, Australia.
  • Posselt M; Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Dresden, 01328, Saxony, Germany.
  • Spemann D; School of Physics, ARC Centre for Quantum Computation and Communication Technology, University of Melbourne, Parkville, VIC, 3010, Australia.
  • Johnson BC; Leibniz Institute of Surface Engineering (IOM), Leipzig, 04318, Saxony, Germany.
  • Firgau HR; School of Physics, ARC Centre for Quantum Computation and Communication Technology, University of Melbourne, Parkville, VIC, 3010, Australia.
  • Mayes E; School of Electrical Engineering and Telecommunications, ARC Centre for Quantum Computation and Communication Technology, UNSW Sydney, Sydney, NSW, 2052, Australia.
  • McCallum JC; RMIT Microscopy and Microanalysis Facility, RMIT University, Melbourne, VIC, 3001, Australia.
  • Morello A; School of Physics, ARC Centre for Quantum Computation and Communication Technology, University of Melbourne, Parkville, VIC, 3010, Australia.
  • Jamieson DN; School of Electrical Engineering and Telecommunications, ARC Centre for Quantum Computation and Communication Technology, UNSW Sydney, Sydney, NSW, 2052, Australia.
Adv Mater ; 34(3): e2103235, 2022 Jan.
Article en En | MEDLINE | ID: mdl-34632636
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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Tipo de estudio: Diagnostic_studies / Prognostic_studies Idioma: En Revista: Adv Mater Asunto de la revista: BIOFISICA / QUIMICA Año: 2022 Tipo del documento: Article País de afiliación: Australia
Texto completo
Imprimir
XML
PubMed Links
Buscar en Google

Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Tipo de estudio: Diagnostic_studies / Prognostic_studies Idioma: En Revista: Adv Mater Asunto de la revista: BIOFISICA / QUIMICA Año: 2022 Tipo del documento: Article País de afiliación: Australia