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12-inch growth of uniform MoS2 monolayer for integrated circuit manufacture.
Xia, Yin; Chen, Xinyu; Wei, Jinchen; Wang, Shuiyuan; Chen, Shiyou; Wu, Simin; Ji, Minbiao; Sun, Zhengzong; Xu, Zihan; Bao, Wenzhong; Zhou, Peng.
Afiliación
  • Xia Y; State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China.
  • Chen X; State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China.
  • Wei J; State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China.
  • Wang S; State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China.
  • Chen S; State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China.
  • Wu S; State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai, China.
  • Ji M; State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai, China.
  • Sun Z; State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China.
  • Xu Z; Shenzhen SixCarbon Technology, Shenzhen, China. xu@6carbon.com.
  • Bao W; State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China. baowz@fudan.edu.cn.
  • Zhou P; State Key Laboratory of ASIC and System, School of Microelectronics, Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai, China. pengzhou@fudan.edu.cn.
Nat Mater ; 22(11): 1324-1331, 2023 Nov.
Article en En | MEDLINE | ID: mdl-37770676
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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Idioma: En Revista: Nat Mater Asunto de la revista: CIENCIA / QUIMICA Año: 2023 Tipo del documento: Article País de afiliación: China
Texto completo
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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Idioma: En Revista: Nat Mater Asunto de la revista: CIENCIA / QUIMICA Año: 2023 Tipo del documento: Article País de afiliación: China