High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths.
Opt Lett
; 35(15): 2615-7, 2010 Aug 01.
Article
em En
| MEDLINE
| ID: mdl-20680076
ABSTRACT
Volume x-ray gratings consisting of a multilayer coating deposited on a blazed substrate can diffract with very high efficiency, even in high orders if diffraction conditions in-plane (grating) and out-of-plane (Bragg multilayer) are met simultaneously. This remarkable property, however, depends critically on the ability to create a structure with near atomic perfection. In this Letter we report on a method to produce these structures. We report measurements that show, for a 5000l/mm grating diffracting in the third order, a diffraction efficiency of 37.6% at a wavelength of 13.6nm. This work now shows a direct route to achieving high diffraction efficiency in high order at wavelengths throughout the soft x-ray energy range.
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Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Opt Lett
Ano de publicação:
2010
Tipo de documento:
Article
País de afiliação:
Estados Unidos