Intense boundary emission destroys normal radio-frequency plasma sheath.

ABSTRACT

The plasma sheath is the non-neutral space charge region that isolates bulk plasma from a boundary. Radio-frequency (RF) sheaths are formed when applying RF voltage to electrodes. Generally, applied bias is mainly consumed by a RF sheath, which shields an external field. Here we report evidence that an intense boundary emission destroys a normal RF sheath and establishes a type of RF plasma where external bias is consumed by bulk plasma instead of a sheath. Ions are naturally confined while plasma electrons are unobstructed, generating a strong RF current in the entire plasma, combined with a unique particle and energy balance. The proposed model offers the possibility for ion erosion mitigation of a plasma-facing component. It also inspires techniques for reaction rate control in plasma processing and wave mode conversion.