Monolithic optical microlithography of high-density elastic circuits.

Zheng, Yu-Qing; Liu, Yuxin; Zhong, Donglai; Nikzad, Shayla; Liu, Shuhan; Yu, Zhiao; Liu, Deyu; Wu, Hung-Chin; Zhu, Chenxin; Li, Jinxing; Tran, Helen; Tok, Jeffrey B-H; Bao, Zhenan

Zheng, Yu-Qing; Liu, Yuxin; Zhong, Donglai; Nikzad, Shayla; Liu, Shuhan; Yu, Zhiao; Liu, Deyu; Wu, Hung-Chin; Zhu, Chenxin; Li, Jinxing; Tran, Helen; Tok, Jeffrey B-H; Bao, Zhenan.

Afiliação

Zheng YQ; Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA.
Liu Y; Department of Bioengineering, Stanford University, Stanford, CA 94305, USA.
Zhong D; Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA.
Nikzad S; Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA.
Liu S; Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA.
Yu Z; Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA.
Liu D; Department of Chemistry, Stanford University, Stanford, CA 94305, USA.
Wu HC; Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA.
Zhu C; Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA.
Li J; Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA.
Tran H; Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA.
Tok JB; Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA.
Bao Z; Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA.

Science ; 373(6550): 88-94, 2021 07 02.

Article em En | MEDLINE | ID: mdl-34210882

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Science Ano de publicação: 2021 Tipo de documento: Article País de afiliação: Estados Unidos

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