Rectangular Amplitude Mask-Based Auto-Focus Method with a Large Range and High Precision for a Micro-LED Wafer Defects Detection System.

He, Wenjun; Ma, Yufeng; Wang, Wenbo

He, Wenjun; Ma, Yufeng; Wang, Wenbo.

Afiliação

He W; College of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun 130022, China.
Ma Y; College of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun 130022, China.
Wang W; College of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun 130022, China.

Sensors (Basel) ; 23(17)2023 Aug 31.

Article em En | MEDLINE | ID: mdl-37688033

Palavras-chave

Micro-LED; auto-focus; eccentric beam; rectangular amplitude mask

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Diagnostic_studies Idioma: En Revista: Sensors (Basel) Ano de publicação: 2023 Tipo de documento: Article País de afiliação: China

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