RESUMO
This paper presents an output offset minimized capacitance-to-digital interface for a MEMS accelerometer. With a gain-enhanced voltage-controlled oscillator (VCO)-based quantization loop, the interface is able to output a digital signal with improved dynamic range. For optimizing the output offset caused by nonideal factors (e.g., the bond-wire drift), a nested digital chopping feedback loop is embedded in the VCO-based quantization loop. It enables the interface to minimize the output offset without digital filtering and digital-to-analog conversion. The proposed architecture is well suited for dynamic range and offset improvements with low cost. Fabricated with a 0.18 µm Global Foundry (GF) CMOS process, the interface offers a 78 dB dynamic range with 0.4% nonlinearity from a single 2 V supply. With the input referred offset up to 1.3 pF, the offset cancellation loop keeps the DC output offset within 40 mV. The power dissipation is 6.5 mW with a bandwidth of 4 kHz.
RESUMO
This study aims to propose a capacitance-to-digital converter (CDC) based on a third-order cascade of integrators with a feed-forward (CIFF) incremental sigma-delta modulator for smart humidity sensor application. Disguised zoom-in technology was proposed to enlarge the measurable range of the CDC. The input range of the CDC was 0-388 pF. The proposed CDC was realized using 0.18 µm complementary metal-oxide-semiconductor technology. Results show that the CDC performs a 13-bit capacitance-to-digital conversion in 0.8 ms. The analog system consumes 169.7 µA from a 1.8 V supply, which corresponds to a figure of merit (FOM) of 3.0 nJ/step. The proposed CDC was combined with a HS1101 humidity sensor to demonstrate its incorporation in an overall system design. The resolution was 0.7% relative humidity (RH) over a range of 30%-90% RH.