The Application of Commercial Surface Acoustic Wave Radio Communication Filters as Transducers for DMMP Sensors.

In the present study, we used two popular radio communication SAW resonators as a base for gas sensors and tested their performance. Taking into account issues related to sensor sensitivity, the possibility of applying a sensor layer, the availability of devices, and other related issues, we selected two popular single-port resonators with center frequencies of 315 and 433 MHz (models R315 and R433, respectively) for testing purposes. Both resonators were equipped with a sensitive film of hexafluoroisopropanol-substituted polydimethylsiloxane, a material that selectively absorbs molecules with a high ability to form basic hydrogen bonds. Fabricated sensors were used to detect trace amounts of dimethyl methylphosphonate (DMMP) vapor, which has often been used in similar studies as a nerve chemical warfare agent simulant. Sensors using both devices loaded with sensor layers of an optimal thickness rapidly reacted to a gas containing DMMP at a concentration of 3 mg/m3, generating a stable analytical signal ranging from several to several dozen kilohertz. In the case of R433, the frequency signal was 20.5 kHz at 1 min from the beginning of exposure to DMMP. The obtained results showed that the used transducers exhibited good performance as a base for gas sensors. Finally, their suitability for sensing applications was confirmed by a comparison with the results obtained in previous similar studies.

Miniaturized Antenna Design for Wireless and Powerless Surface Acoustic Wave Temperature Sensors.

This paper presents the introduction, design, and experimental validation of two small helical antennae. These antennae are a component of the surface acoustic wave (SAW) sensor interrogation system, which has been miniaturized to operate at 915 MHz and aims to improve the performance of wireless passive SAW temperature-sensing applications. The proposed antenna designs are the normal-mode cylindrical helical antenna (CHA) and the hemispherical helical antenna (HSHA); both designed structures are developed for the ISM band, which ranges from 902 MHz to 928 MHz. The antennae exhibit resonance at 915 MHz with an operational bandwidth of 30 MHz for the CHA and 22 MHz for the HSHA. A notch occurs in the operating band, caused by the characteristics of the SAW sensor. The presence of this notch is crucial for the temperature measurement by aiding in calculating the frequency shifting of that notch. The decrement in the resonance frequency of the SAW sensor is about 66.67 kHz for every 10 °C, which is obtained by conducting the temperature measurement of the system model across temperature environments ranging from 30 °C to 90 °C to validate the variation in system performance.

Isolation and Characterization of Exosomes from Cancer Cells Using Antibody-Functionalized Paddle Screw-Type Devices and Detection of Exosomal miRNA Using Piezoelectric Biosensor.

Exosomes are small extracellular vesicles produced by almost all cell types in the human body, and exosomal microRNAs (miRNAs) are small non-coding RNA molecules that are known to serve as important biomarkers for diseases such as cancer. Given that the upregulation of miR-106b is closely associated with several types of malignancies, the sensitive and accurate detection of miR-106b is important but difficult. In this study, a surface acoustic wave (SAW) biosensor was developed to detect miR-106b isolated from cancer cells based on immunoaffinity separation technique using our unique paddle screw device. Our novel SAW biosensor could detect a miR-106b concentration as low as 0.0034 pM in a linear range from 0.1 pM to 1.0 µM with a correlation coefficient of 0.997. Additionally, we were able to successfully detect miR-106b in total RNA extracted from the exosomes isolated from the MCF-7 cancer cell line, a model system for human breast cancer, with performance comparable to commercial RT-qPCR methods. Therefore, the exosome isolation by the paddle screw method and the miRNA detection using the SAW biosensor has the potential to be used in basic biological research and clinical diagnosis as an alternative to RT-qPCR.

A Dual-Mode Surface Acoustic Wave Delay Line for the Detection of Ice on 64°-Rotated Y-Cut Lithium Niobate.

Ice accumulation on infrastructure poses severe safety risks and economic losses, necessitating effective detection and monitoring solutions. This study introduces a novel approach employing surface acoustic wave (SAW) sensors, known for their small size, wireless operation, energy self-sufficiency, and retrofit capability. Utilizing a SAW dual-mode delay line device on a 64°-rotated Y-cut lithium niobate substrate, we demonstrate a solution for combined ice detection and temperature measurement. In addition to the shear-horizontal polarized leaky SAW, our findings reveal an electrically excitable Rayleigh-type wave in the X+90° direction on the same cut. Experimental results in a temperature chamber confirm capability for reliable differentiation between liquid water and ice loading and simultaneous temperature measurements. This research presents a promising advancement in addressing safety concerns and economic losses associated with ice accretion.

Echo Frequency Estimation Technology for Passive Surface Acoustic Wave Resonant Sensors Based on a Genetic Algorithm.

Passive wireless surface acoustic wave (SAW) resonant sensors are widely used in measuring pressure, temperature, and torque, typically detecting sensing parameters by measuring the echo signal frequency of SAW resonators. Therefore, the accuracy of echo signal frequency estimation directly affects the performance index of the sensor. Due to the exponential attenuation trend of the echo signal, the duration is generally approximately 10 µs, with conventional frequency domain analysis methods limited by the sampling frequency and data points. Thus, the resolution of frequency estimation is limited. Here, signal time-domain fitting combined with a genetic algorithm is used to estimate SAW echo signal frequency. To address the problem of slow estimation speed and poor timeliness caused by a conventional genetic algorithm, which needs to simultaneously estimate multiple parameters, such as signal amplitude, phase, frequency, and envelope, the Hilbert transform is proposed to remove the signal envelope and estimate its amplitude, and the fast Fourier transform subsection method is used to analyze the initial phase of the signal. The genetic algorithm is thereby optimized to realize the frequency estimation of SAW echo signals under a single parameter. The developed digital signal processing frequency detection system was monitored in real time to estimate the frequency of an SAW echo signal lasting 10 µs and found to have only 100 sampling points. The proposed method has a frequency estimation error within 3 kHz and a frequency estimation time of less than 1 s, which is eight times faster than the conventional genetic algorithm.

Enhanced Frequency Stability of SAW Yarn Tension Sensor by Using the Dual Differential Channel Surface Acoustic Wave Oscillator.

This paper presents a 60 MHz surface acoustic wave (SAW) yarn tension sensor incorporating a novel SAW oscillator with high-frequency stability. A SAW delay line was fabricated on ST-X quartz substrate using the unbalanced-split electrode and bi-directional engraving slots. The dual differential channel delay linear acoustic surface wave oscillator is designed and implemented to test yarn tension, which can effectively remove the interference of temperature, humidity, and other peripheral factors through differential design. The yarn tension sensor using the surface acoustic wave has high-precision characteristics, and the SAW delay line oscillator is designed to ensure the test system's stable operation. The effect of time and tension on oscillator frequency stability is studied in detail, and the single oscillator and the dual differential channel system were tested, respectively. After using the dual differential channel system, the short-term frequency stability from is reduced from 1.0163 ppm to 0.17726 ppm, the frequency accuracy of the tension sensor is improved from 134 Hz to 27 Hz, and the max frequency jump steady is reduced from 2.2395 ppm to 0.45123 ppm.

High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure.

Surface acoustic wave resonators are widely applied in electronics, communication, and other engineering fields. However, the spurious modes generally present in resonators can cause deterioration in device performance. Therefore, this paper proposes a hexagonal weighted structure to suppress them. With the construction of a finite element resonator model, the parameters of the interdigital transducer (IDT) and the area of the dummy finger weighting are determined. The spurious waves are confined within the dummy finger area, whereas the main mode is less affected by this structure. To verify the suppression effect of the simulation, resonators with conventional and hexagonal weighted structures are fabricated using the micro-electromechanical systems (MEMS) process. After the S-parameter test of the prepared resonators, the hexagonal weighted resonators achieve a high level of spurious mode suppression. Their properties are superior to those of the conventional structure, with a higher Q value (10,406), a higher minimum return loss (25.7 dB), and a lower ratio of peak sidelobe (19%). This work provides a feasible solution for the design of SAW resonators to suppress spurious modes.

Highly Sensitive and Selective Surface Acoustic Wave Ammonia Sensor Operated at Room Temperature with a Polyacrylic Acid Sensing Layer.

In this study, polyacrylic acid (PAA) films were deposited onto a quartz surface acoustic wave (SAW) resonator using a spin-coating technique for ammonia sensing operated at room temperature, and the sensing mechanisms and performance were systematically studied. The oxygen-containing functional groups on the surfaces of the PAA film make it sensitive and selective to ammonia molecules, even when tested at room temperature. The ammonia molecules adsorbed by the oxygen-containing functional groups of PAA (e.g., hydroxyl and epoxy groups) increase the membrane's stiffness, which was identified as the primary mechanism leading to the positive frequency shifts. However, mass loading due to adsorption of ammonia molecules is not a major reason as it will result in a negative frequency shifts. When the PAA coated SAW sensor was exposed to ammonia with a low concentration of 500 ppb, it showed a positive frequency shift of 225 Hz, with both good repeatability and stability, as well as a good selectivity to ammonia compared with those to C2H5OH, H2, HCl, H2S, CO, NO2, NO, and CH3COCH3.

Removal of Non-Specifically Bound Proteins Using Rayleigh Waves Generated on ST-Quartz Substrates.

Label-free biosensors are plagued by the issue of non-specific protein binding which negatively affects sensing parameters such as sensitivity, selectivity, and limit-of-detection. In the current work, we explore the possibility of using the Rayleigh waves in ST-Quartz devices to efficiently remove non-specifically bound proteins via acoustic streaming. A coupled-field finite element (FE) fluid structure interaction (FSI) model of a surface acoustic wave (SAW) device based on ST-Quartz substrate in contact with a liquid loading was first used to predict trends in forces related to SAW-induced acoustic streaming. Based on model predictions, it is found that the computed SAW body force is sufficient to overcome adhesive forces between particles and a surface while lift and drag forces prevent reattachment for a range of SAW frequencies. We further performed experiments to validate the model predictions and observe that the excitation of Rayleigh SAWs removed non-specifically bound (NSB) antigens and antibodies from sensing and non-sensing regions, while rinsing and blocking agents were ineffective. An amplified RF signal applied to the device input disrupted the specific interactions between antigens and their capture antibody as well. ST-quartz allows propagation of Rayleigh and leaky SH-SAW waves in orthogonal directions. Thus, the results reported here could allow integration of three important biosensor functions on a single chip, i.e., removal of non-specific binding, mixing, and sensing in the liquid phase.

Electrical and Optical Characterization of SAW Sensors Coated with Parylene C and Their Analysis Using the Coupling-of-Modes (COM) Theory.

In this paper, we present how complementary characterization techniques, such as electrical measurements with a vector network analyzer (VNA), optical measurements with a laser Doppler vibrometer (LDV), and numerical simulations with the finite element method, coupled with spectral domain analysis (FEMSDA), allow us to independently access different properties of a SAW device and fully characterize its operation using the coupling-of-modes theory (COM). A set of chemical SAW sensors coated with parylene C layers of different thicknesses (1, 1.5, and 2 µm) and an uncoated sensor were used as test samples. The sensors represent dual-channel electroacoustic delay lines operating in the vicinity of 77 MHz. The IDTs consist of split aluminum electrodes deposited on a AT-cut quartz substrate. The thickness-dependent influence of the parylene C layer was observed on the operating frequency (SAW velocity), static capacitance, attenuation, crosstalk, and reflection coefficient. COM parameters were reported for the four cases considered; measured and simulated data show good agreement. The presented approach is suitable for the design, characterization, and validation of polymer film-coated SAW sensors.

Carbon SH-SAW-Based Electronic Nose to Discriminate and Classify Sub-ppm NO2.

In this research, a compact electronic nose (e-nose) based on a shear horizontal surface acoustic wave (SH-SAW) sensor array is proposed for the NO2 detection, classification and discrimination among some of the most relevant surrounding toxic chemicals, such as carbon monoxide (CO), ammonia (NH3), benzene (C6H6) and acetone (C3H6O). Carbon-based nanostructured materials (CBNm), such as mesoporous carbon (MC), reduced graphene oxide (rGO), graphene oxide (GO) and polydopamine/reduced graphene oxide (PDA/rGO) are deposited as a sensitive layer with controlled spray and Langmuir-Blodgett techniques. We show the potential of the mass loading and elastic effects of the CBNm to enhance the detection, the classification and the discrimination of NO2 among different gases by using Machine Learning (ML) techniques (e.g., PCA, LDA and KNN). The small dimensions and low cost make this analytical system a promising candidate for the on-site discrimination of sub-ppm NO2.

Acoustic Cell Separation Based on Density and Mechanical Properties.

Density and mechanical properties (e.g., compressibility or bulk modulus) are important cellular biophysical markers. As such, developing a method to separate cells directly based on these properties can benefit various applications including biological research, diagnosis, prognosis, and therapeutics. As a potential solution, surface acoustic wave (SAW)-based cell separation has demonstrated advantages in terms of biocompatibility and compact device size. However, most SAW-reliant cell separations are achieved using an entangled effect of density, various mechanical properties, and size. In this work, we demonstrate SAW-based separation of cells/particles based on their density and compressibility, irrespective of their sizes, by manipulating the acoustic properties of the fluidic medium. Using our platform, SAW-based separation is achieved by varying the dimensions of the microfluidic channels, the wavelengths of acoustic signals, and the properties of the fluid media. Our method was applied to separate paraformaldehyde-treated and fresh Hela cells based on differences in mechanical properties; a recovery rate of 85% for fixed cells was achieved. It was also applied to separate red blood cells (RBCs) and white blood cells (WBCs) which have different densities. A recovery rate of 80.5% for WBCs was achieved.

Simulation/Experiment Confrontation, an Efficient Approach for Sensitive SAW Sensors Design.

Sensitivity is one of the most important parameters to put in the foreground in all sensing applications. Its increase is therefore an ongoing challenge, particularly for surface acoustic wave (SAW) sensors. Herein, finite element method (FEM) simulation using COMSOL Multiphysics software is first used to simulate the physical and electrical properties of SAW delay line. Results indicate that 2D configuration permits to accurately obtain all pertinent parameters, as in 3D simulation, with very substantial time saving. A good agreement between calculation and experiment, in terms of transfer functions (S21 spectra), was also shown to evaluate the dependence of the SAW sensors sensitivity on the operating frequency; 2D simulations have been conducted on 104 MHz and 208 MHz delay lines, coated with a polyisobutylene (PIB) as sensitive layer to dichloromethane (DCM). A fourfold increase in sensitivity was obtained by doubling frequency. Both sensors were then realized and tested as chem-sensors to detect zinc ions in liquid media. 9-{[4-({[4-(9anthrylmethoxy)phenyl]sulfanyl} methyl)]methyl] anthracene (TDP-AN) was selected as the sensing layer. Results show a comparable response curves for both designed sensors, in terms of limit of detection and dissociation constants Kd values. On the other hand, experimental sensitivity values were of the order of [7.0 ± 2.8] × 108 [°/M] and [16.0 ± 7.6] × 108 [°/M] for 104 MHz and 208 MHz sensors, respectively, confirming that the sensitivity increases with frequency.

Frequency Dependency of the Delta-E Effect and the Sensitivity of Delta-E Effect Magnetic Field Sensors.

In recent years the delta-E effect has been used for detecting low frequency and low amplitude magnetic fields. Delta-E effect sensors utilize a forced mechanical resonator that is detuned by the delta-E effect upon application of a magnetic field. Typical frequencies of operation are from several kHz to the upper MHz regime. Different models have been used to describe the delta-E effect in those devices, but the frequency dependency has mainly been neglected. With this work we present a simple description of the delta-E effect as a function of the differential magnetic susceptibility χ of the magnetic material. We derive an analytical expression for χ that permits describing the frequency dependency of the delta-E effect of the Young's modulus and the magnetic sensitivity. Calculations are compared with measurements on soft-magnetic (Fe90Co10)78Si12B10 thin films. We show that the frequency of operation can have a strong influence on the delta-E effect and the magnetic sensitivity of delta-E effect sensors. Overall, the delta-E effect reduces with increasing frequency and results in a stiffening of the Young's modulus above the ferromagnetic resonance frequency. The details depend on the Gilbert damping. Whereas for large Gilbert damping the sensitivity continuously decreases with frequency, typical damping values result in an amplification close to the ferromagnetic resonance frequency.

Finite Element Analysis for Surface Acoustic Wave Device Characteristic Properties and Sensitivity.

The most vital step in the development of novel and existing surface acoustic wave (SAW)-based sensors and transducers is their design and optimization. Demand for SAW devices has been steadily increasing due to their low cost, portability, and versatility in electronics, telecommunications, and biosensor applications. However, a full characterization of surface acoustic wave biosensors in a three-dimensional (3D) finite element model has not yet been developed. In this study, a novel approach is developed for analyzing shear horizontal Love wave resonator devices. The developed modeling methodology was verified using fabricated devices. A thorough analysis of the 3D model and the experimental device was performed in this study including scattering parameters (S-parameters), reflection coefficient parameters, transmission parameters, and phase velocity. The simulated results will be used as a design guideline for future device design and optimization, which has thus far resulted in close matching between prediction and experimental results. This manuscript is the first to demonstrate a 3D finite element model to correlate the sensitivity of the SAW device with the magnitude of the phase shift, the real and imaginary part of the response, insertion loss, and the frequency shift. The results show that the imaginary part of the response shift has a higher sensitivity compared to other parameters.

An Overview of High Frequency Acoustic Sensors-QCMs, SAWs and FBARs-Chemical and Biochemical Applications.

Acoustic devices have found wide applications in chemical and biosensing fields owing to their high sensitivity, ruggedness, miniaturized design and integration ability with on-field electronic systems. One of the potential advantages of using these devices are their label-free detection mechanism since mass is the fundamental property of any target analyte which is monitored by these devices. Herein, we provide a concise overview of high frequency acoustic transducers such as quartz crystal microbalance (QCM), surface acoustic wave (SAW) and film bulk acoustic resonators (FBARs) to compare their working principles, resonance frequencies, selection of piezoelectric materials for their fabrication, temperature-frequency dependency and operation in the liquid phase. The selected sensor applications of these high frequency acoustic transducers are discussed primarily focusing on the two main sensing domains, i.e., biosensing for working in liquids and gas/vapor phase sensing. Furthermore, the sensor performance of high frequency acoustic transducers in selected cases is compared with well-established analytical tools such as liquid chromatography mass spectrometry (LC-MS), gas chromatographic (GC) analysis and enzyme-linked immunosorbent assay (ELISA) methods. Finally, a general comparison of these acoustic devices is conducted to discuss their strengths, limitations, and commercial adaptability thus, to select the most suitable transducer for a particular chemical/biochemical sensing domain.

Fast and Accurate Finite Transducer Analysis Method for Wireless Passive Impedance-Loaded SAW Sensors.

An accurate and fast simulation tool plays an important role in the design of wireless passive impedance-loaded surface acoustic wave (SAW) sensors which have received much attention recently. This paper presents a finite transducer analysis method for wireless passive impedance-loaded SAW sensors. The finite transducer analysis method uses a numerically combined finite element method-boundary element method (FEM/BEM) model to analyze non-periodic transducers. In non-periodic transducers, FEM/BEM was the most accurate analysis method until now, however this method consumes central processing unit (CPU) time. This paper presents a faster algorithm to calculate the bulk wave part of the equation coefficient which usually requires a long time. A complete non-periodic FEM/BEM model of the impedance sensors was constructed. Modifications were made to the final equations in the FEM/BEM model to adjust for the impedance variation of the sensors. Compared with the conventional method, the proposed method reduces the computation time efficiently while maintaining the same high degree of accuracy. Simulations and their comparisons with experimental results for test devices are shown to prove the effectiveness of the analysis method.

Enhanced Sensitivity of a Hydrogen Sulfide Sensor Based on Surface Acoustic Waves at Room Temperature.

In this contribution, a new surface acoustic wave (SAW)-based sensor was proposed for sensing hydrogen sulfide (H2S) at room temperature (30 °C), which was composed of a phase discrimination circuit, a SAW-sensing device patterned with delay line, and a triethanolamine (TEA) coating along the SAW propagation path of the sensing device. The TEA was chosen as the sensitive interface for H2S sensing, owing to the high adsorption efficiency by van der Waals' interactions and hydrogen bonds with H2S molecules at room temperature. The adsorption in TEA towards H2S modulates the SAW propagation, and the change in the corresponding phase was converted into voltage signal proportional to H2S concentration was collected as the sensor signal. A SAW delay line patterned on Y-cut quartz substrate with Al metallization was developed photographically, and lower insertion and excellent temperature stability were achieved thanks to the single-phase unidirectional transducers (SPUDTs) and lower cross-sensitivity of the piezoelectric substrate. The synthesized TEA by the reaction of ethylene oxide and ammonia was dropped into the SAW propagation path of the developed SAW device to build the H2S sensor. The developed SAW sensor was characterized by being collecting into the phase discrimination circuit. The gas experimental results appear that fast response (7 s at 4 ppm H2S), high sensitivity (0.152 mV/ppm) and lower detection limit (0.15 ppm) were achieved at room temperature. It means the proposed SAW sensor will be promising for H2S sensing.

Room-Temperature Ammonia Sensor Based on ZnO Nanorods Deposited on ST-Cut Quartz Surface Acoustic Wave Devices.

Using a seed layer-free hydrothermal method, ZnO nanorods (NRs) were deposited on ST-cut quartz surface acoustic wave (SAW) devices for ammonia sensing at room temperature. For a comparison, a ZnO film layer with a thickness of 30 nm was also coated onto an ST-cut quartz SAW device using a sol-gel and spin-coating technique. The ammonia sensing results showed that the sensitivity, repeatability and stability of the ZnO NR-coated SAW device were superior to those of the ZnO film-coated SAW device due to the large surface-to-volume ratio of the ZnO NRs.

Design and Implementation of 2.45 GHz Passive SAW Temperature Sensors with BPSK Coded RFID Configuration.

A surface acoustic wave based passive temperature sensor capable of multiple access is investigated. Binary Phase Shift Keying (BPSK) codes of eight chips were implemented using a reflective delay line scheme on a Y-Z LiNbO3 piezoelectric substrate. An accurate simulation based on the combined finite- and boundary element method (FEM/BEM) was performed in order to determine the optimum design parameters. The scaling factor 's' and time delay factor 'τ' were extracted using signal processing techniques based on the wavelet transform of the correlation function, and then evaluated at various ambient temperatures. The scaling factor 's' gave a more stable and reliable response to temperature than the time delay factor 'τ'. Preliminary results show that the sensor response is fast and consistent subject to ambient temperature and it exhibits good linearity of 0.9992 with temperature varying from 0 to 130 °C.