Metalloorganic solution deposition of ferroelectric PZT films.
IEEE Trans Ultrason Ferroelectr Freq Control
; 38(6): 684-9, 1991.
Article
em En
| MEDLINE
| ID: mdl-18267635
ABSTRACT
The metallo-organic solution deposition (MOSD or sol-gel) technique can be used for preparing lead zirconate titanate (PZT) ceramics with a wide range of compositions and crystal structures for electrooptical applications. Film morphology is affected by the stoichiometry of the film, hydrolysis and polymerization of the sol-gel solution, and thermal treatment of the deposited material. The lattice parameter decreases with the amount of titanium in the PZT, in agreement with ceramic data. A slight initial excess of lead in the coating solution is found to improve film morphology. Unlike traditional powder ceramic processing techniques, MOSD permits the growth of small uniform grains that are conducive to achieving consistent electronic and optical properties. Results show that the properties of films prepared by the MOSD process can be tailored to meet the needs of device applications.
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Base de dados:
MEDLINE
Idioma:
En
Revista:
IEEE Trans Ultrason Ferroelectr Freq Control
Assunto da revista:
MEDICINA NUCLEAR
Ano de publicação:
1991
Tipo de documento:
Article
País de afiliação:
Canadá