Performance comparison of cross-like Hall plates with different covering layers.
Sensors (Basel)
; 15(1): 672-86, 2014 Dec 31.
Article
em En
| MEDLINE
| ID: mdl-25559001
ABSTRACT
This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The effect of the P-type region over the active area on the current-related sensitivity is studied for different Hall plate designs. In addition, the correlation between the P-type covering layer and offset is analyzed. The best structure out of three designs is determined. Besides, a modified eight-resistor circuit model for the Hall plate is presented with improved accuracy by taking the offset into account.
Texto completo:
1
Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Sensors (Basel)
Ano de publicação:
2014
Tipo de documento:
Article
País de afiliação:
China