Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications.
Sensors (Basel)
; 17(9)2017 Sep 12.
Article
em En
| MEDLINE
| ID: mdl-28895906
ABSTRACT
Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.
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Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Sensors (Basel)
Ano de publicação:
2017
Tipo de documento:
Article
País de afiliação:
Espanha