Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces.
Sensors (Basel)
; 20(15)2020 Jul 23.
Article
em En
| MEDLINE
| ID: mdl-32718085
ABSTRACT
Metasurfaces have shown promising potential to miniaturize existing bulk optical components thanks to their extraordinary optical properties and ultra-thin, small, and lightweight footprints. However, the absence of proper manufacturing methods has been one of the main obstacles preventing the practical application of metasurfaces and commercialization. Although a variety of fabrication techniques have been used to produce optical metasurfaces, there are still no universal scalable and high-throughput manufacturing methods that meet the criteria for large-scale metasurfaces for device/product-level applications. The fundamentals and recent progress of the large area and high-throughput manufacturing methods are discussed with practical device applications. We systematically classify various top-down scalable patterning techniques for optical metasurfaces firstly, optical and printing methods are categorized and then their conventional and unconventional (emerging/new) techniques are discussed in detail, respectively. In the end of each section, we also introduce the recent developments of metasurfaces realized by the corresponding fabrication methods.
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Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Sensors (Basel)
Ano de publicação:
2020
Tipo de documento:
Article