High-accuracy deflectometric microscope system with a large slope range.
Opt Lett
; 46(9): 2011-2014, 2021 May 01.
Article
em En
| MEDLINE
| ID: mdl-33929406
ABSTRACT
We propose an off-axis deflectometric microscope system for microscopic surface testing with both high measurement accuracy and a large slope dynamic range. A high-luminance liquid crystal display directly illuminates the tested sample with coded fringes, and then the reflected fringes passing through a microscope objective are captured by a pinhole camera, from which the deflectometric microscopic testing with a large slope range can be achieved. The accuracy of the proposed system is validated numerically and experimentally, and a large measurable slope dynamic range is also demonstrated. The proposed system provides a feasible way with the slope range in the order of sub-radians and sag resolution better than 0.05 nm.
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1
Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Opt Lett
Ano de publicação:
2021
Tipo de documento:
Article