High-efficiency grating coupler for an ultralow-loss Si3N4-based platform.
Opt Lett
; 47(10): 2498-2501, 2022 May 15.
Article
em En
| MEDLINE
| ID: mdl-35561384
ABSTRACT
Integrated silicon nitride waveguides of 100â
nm height can achieve ultralow propagation losses below 0.1â
dB/cm at the 1550â
nm wavelength band but lack the scattering strength to form efficient grating couplers. An enhanced grating coupler design based on an amorphous silicon layer on top of silicon nitride is proposed and demonstrated to improve the directionality of the coupler. The fabrication process is optimized for a self-alignment process between the amorphous silicon and silicon nitride layers without increasing waveguide losses. Experimental coupling losses of 5â
dB and a 3â
dB bandwidth of 75â
nm are achieved with both regular and focusing designs.
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MEDLINE
Idioma:
En
Revista:
Opt Lett
Ano de publicação:
2022
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Article