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1.
Microsyst Nanoeng ; 10: 43, 2024.
Artículo en Inglés | MEDLINE | ID: mdl-38523655

RESUMEN

Pre-shaped microbeams, curved or inclined, are widely used in MEMS for their interesting stiffness properties. These mechanisms allow a wide range of positive and negative stiffness tuning in their direction of motion. A mechanism of pre-shaped beams with opposite curvature, connected in a parallel configuration, can be electrothermally tuned to reach a near-zero or negative stiffness behavior at the as-fabricated position. The simple structure helps incorporate the tunable spring mechanism in different designs for accelerometers, even with different transduction technologies. The sensitivity of the accelerometer can be considerably increased or tuned for different applications by electrothermally changing the stiffness of the spring mechanism. Opposite inclined beams are implemented in a capacitive micromachined accelerometer. The measurements on fabricated prototypes showed more than 55 times gain in sensitivity compared to their initial sensitivity. The experiments showed promising results in enhancing the resolution of acceleration sensing and the potential to reach unprecedent performance in micromachined accelerometers.

2.
Micromachines (Basel) ; 13(1)2021 Dec 21.
Artículo en Inglés | MEDLINE | ID: mdl-35056166

RESUMEN

The surge in fabrication techniques for micro- and nanodevices gave room to rapid growth in these technologies and a never-ending range of possible applications emerged. These new products significantly improve human life, however, the evolution in the design, simulation and optimization process of said products did not observe a similarly rapid growth. It became thus clear that the performance of micro- and nanodevices would benefit from significant improvements in this area. This work presents a novel methodology for electro-mechanical co-optimization of micro-electromechanical systems (MEMS) inertial sensors. The developed software tool comprises geometry design, finite element method (FEM) analysis, damping calculation, electronic domain simulation, and a genetic algorithm (GA) optimization process. It allows for a facilitated system-level MEMS design flow, in which electrical and mechanical domains communicate with each other to achieve an optimized system performance. To demonstrate the efficacy of the methodology, an open-loop capacitive MEMS accelerometer and an open-loop Coriolis vibratory MEMS gyroscope were simulated and optimized-these devices saw a sensitivity improvement of 193.77% and 420.9%, respectively, in comparison to their original state.

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