RESUMEN
Microfabricated resonators play a crucial role in the development of quantum measurement, including future gravitational wave detectors. We use a micro-genetic algorithm and a finite element method to design a microresonator whose geometry is optimized to maximize the sub-Standard Quantum Limit (SQL) performance including lower thermal noise (TN) below the SQL, a broader sub-SQL region, and a sub-SQL region at lower frequencies. For the proposed design, we study the effects of different geometries of the mirror pad and cantilever microresonator on sub-SQL performance. We find that the maximum ratio of SQL to TN is increased, its frequency is decreased, and the sub-SQL range is increased by increasing the length of the microresonator cantilever, increasing the radius of the mirror pad, decreasing the width of the microresonator cantilever, and shifting the laser beam location from the mirror center. We also find that there exists a trade-off between the maximum ratio of SQL to TN and the sub-SQL bandwidth. The performance of this designed microresonator will allow it to serve as a test-bed for quantum non-demolition measurements and to open new regimes of precision measurement that are relevant for many practical sensing applications, including advanced gravitational wave detectors.