RESUMEN
In recent years, we have been witnessing the intensive development of optical gas sensors. Thin palladium and platinum films as well as tungsten trioxide films with palladium or platinum catalysts are widely used for hydrogen detection, and the optical constants of these materials are required for sensor development. We report the optical parameters retrieved from a set of ellipsometric and transmission spectra for electron-beam evaporated palladium, platinum, and tungsten trioxide films. The tungsten trioxide films were 81 nm, 162 nm, and 515 nm thick and the metal films were as thin as 5-7 nm. Ultrathin palladium and platinum films were shown to be successfully described by local and isotropic permittivity, which is quite different from known bulk values. However, this permittivity showed a strong dependence on adjacent materials, thus illustrating that the ultrathin metallic films can be considered composites characterized by effective permittivity. With the obtained refractive indices and permittivities, the optical spectra of fabricated WO3/Pd and WO3/Pt nanostructures incorporating 1D grating of Al2O3 were in an excellent agreement with the calculated ones without requiring any additional fitting procedures or inclusion of surface roughness layers in numerical models.
RESUMEN
In our recent paper [D. P. Kulikova Opt. Express28(21), 32049 (2020).10.1364/OE.405403], an early version of Fig. 1 was published. This erratum corrects that error.
RESUMEN
Nanostructure based on a dielectric grating (Al2O3), gasochromic oxide (WO3) and catalyst (Pd) is proposed as a hydrogen sensor working at the room temperature. In the fabricated structure, the Pd catalyst film was as thin as 1 nm that allowed a significant decrease in the optical absorption. A high-Q guided-mode resonance was observed in a transmission spectrum at normal incidence and was utilized for hydrogen detection. The spectra were measured at 0-0.12% of hydrogen in a synthetic air (≈ 80% [Formula: see text] and 20% [Formula: see text]). The detection limit below 100 ppm of hydrogen was demonstrated. Hydrogen was detected in the presence of oxygen, which provides the sensor recovery but suppresses the sensor response. Sensor response was treated by the principal component analysis (PCA), which effectively performs noise averaging. Influence of temperature and humidity was measured and processed by PCA, and elimination of the humidity and temperature effects was performed. Square root dependence of the sensor response on the hydrogen concentration (Sievert's law) was observed. Sensor calibration curve was built, and the sensor resolution of 40 ppm was found. Long term stability of the sensor was investigated. Particularly, it was shown that the sensor retains its functionality after 6 months and dozens of acts of response to gas.