Fabrication and characterization of a two-dimensional individually addressable electrowetting microlens array: erratum.

The authors present an erratum to update the Acknowledgements section in their published article, ["Fabrication and characterization of a two-dimensional individually addressable electrowetting microlens array," Opt. Express31, 30550 (2023)10.1364/OE.497992].

On-chip mid-infrared optical sensing with GeSbSe waveguides and resonators.

We fabricated single mode Ge28Sb12Se60 waveguides and resonators using e-beam lithography and achieved a propagation loss of 3.88 dB/cm at 3.66 µm. We compared BCl3 and CHF3 etch chemistries and determined CHF3 produced 1.5 dB/cm higher propagation losses at 3.6 µm due to C-H bond absorption. We use fabricated waveguides to detect an aromatic aldehyde dissolved in a non-polar solvent with a limit of detection of 1.09 µmol/mL. We then reduce this detection limit to 0.25 µmol/mL using the enhancement produced by a chalcogenide ring resonator.

Fabrication and characterization of a two-dimensional individually addressable electrowetting microlens array.

We demonstrate a two-dimensional, individually tunable electrowetting microlens array fabricated using standard microfabrication techniques. Each lens in our array has a large range of focal tunability from -1.7 mm to -∞ in the diverging regime, which we verify experimentally from 0 to 75 V for a device coated in Parylene C. Additionally, each lens can be actuated to within 1% of their steady-state value within 1.5 ms. To justify the use of our device in a phase-sensitive optical system, we measure the wavefront of a beam passing through the center of a single lens in our device over the actuation range and show that these devices have a surface quality comparable to static microlens arrays. The large range of tunability, fast response time, and excellent surface quality of these devices open the door to potential applications in compact optical imaging systems, transmissive wavefront shaping, and beam steering.

MicroLED light source for optical sectioning structured illumination microscopy.

Optical sectioning structured illumination microscopy (OS-SIM) provides optical sectioning capability in wide-field microscopy. The required illumination patterns have traditionally been generated using spatial light modulators (SLM), laser interference patterns, or digital micromirror devices (DMDs) which are too complex to implement in miniscope systems. MicroLEDs have emerged as an alternative light source for patterned illumination due to their extreme brightness capability and small emitter sizes. This paper presents a directly addressable striped microLED microdisplay with 100 rows on a flexible cable (70 cm long) for use as an OS-SIM light source in a benchtop setup. The overall design of the microdisplay is described in detail with luminance-current-voltage characterization. OS-SIM implementation with a benchtop setup shows the optical sectioning capability of the system by imaging within a 500 µm thick fixed brain slice from a transgenic mouse where oligodendrocytes are labeled with a green fluorescent protein (GFP). Results show improved contrast in reconstructed optically sectioned images of 86.92% (OS-SIM) compared with 44.31% (pseudo-widefield). MicroLED based OS-SIM therefore offers a new capability for deep tissue widefield imaging.

Realistic model of entanglement-enhanced sensing in optical fibers.

Experimental limitations such as optical loss and noise have prevented entanglement-enhanced measurements from demonstrating a significant quantum advantage in sensitivity. Holland-Burnett entangled states can mitigate these limitations and still present a quantum advantage in sensitivity. Here we model a fiber-based Mach-Zehnder interferometer with internal loss, detector efficiency, and external phase noise and without pure entanglement. This model features a practical fiber source that transforms the two-mode squeezed vacuum (TMSV) into Holland-Burnett entangled states. We predict that a phase sensitivity 28% beyond the shot noise limit is feasible with current technology. Simultaneously, a TMSV source can provide about 25 times more photon flux than other entangled sources. This system will make fiber-based quantum-enhanced sensing accessible and practical for remote sensing and probing photosensitive materials.

Orbital angular momentum-based dual-comb interferometer for ranging and rotation sensing.

We present a dual-comb interferometer capable of measuring both the range to a target as well as the target's transverse rotation rate. Measurement of the transverse rotation of the target is achieved by preparing the probe comb with orbital angular momentum and measuring the resultant phase shift between interferograms, which arises from the rotational Doppler shift. The distance to the target is measured simultaneously by measuring the time-of-flight delay between the target and reference interferogram centerbursts. With 40 ms of averaging, we measure rotation rates up to 313 Hz with a precision reaching 1 Hz. Distances are measured with an ambiguity range of 75 cm and with a precision of 5.9 µm for rotating targets and 400 nm for a static target. This is the first dual-comb ranging system capable of measuring transverse rotation of a target. This technique has many potential terrestrial and space-based applications for lidar and remote sensing systems.

Fabrication and characterization of high quality GeSbSe reflowed and etched ring resonators.

We demonstrate the fabrication of high Q Ge28Sb12Se60 ring resonators in an all chalcogenide platform through electron-beam lithography, lift-off and thermal reflow. We achieve a Q factor of (3.9 ± 0.2) × 105 in the reflowed ring resonators and (2.5 ± 0.2) × 105 in the reactive ion etched ring resonators at 1550 nm. We measure the line roughness of these devices to estimate the scattering loss. We determine the material and scattering losses of the waveguide and find an additional 1.1 dB/cm excess loss from surface absorption. We fabricate Ge23Sb7S70 waveguides with 0.6 dB/cm of losses and show that Ge23Sb7S70 waveguides do not experience the same kind of excess loss when fabricated under the same conditions. This indicates the excess loss is related to the chemical composition of Ge28Sb12Se60 compound.

Spectrally tunable liquid resonator based on electrowetting.

We present a tunable on-chip liquid resonator in conjunction with a tapered fiber coupling scheme. The resonator consists of a glycerol droplet submerged within an immiscible liquid bath, which mitigates the effects of environmental fluctuations. The platform is fabricated using standard semiconductor techniques, which enable the future integration of photonic components for an on-chip liquid resonator device. The liquid resonator maintains its high Q-factor on chip (105) due to surface tension forming an atomically smooth liquid-liquid interface. Higher Q-factor resonance modes experienced linewidth broadening due to the random excitation of thermal capillary vibrations. Spectral tuning is demonstrated using the electrowetting effect, increasing the surface's wettability and an expansion in the droplet diameter. A maximum spectral tuning of 1.44 nm ± 5 pm is observed by applying 35 V. The tuning range is twice the free spectral range (FSR) of 0.679 nm measured at a pumping wavelength range of 770-775 nm. A 2D axisymmetric finite-element simulation shows resonance modes in good agreement with experimentally measured spectra and with predicted tuning speeds of 20 nm/s.

Selective excitation of plasmon resonances with single V-point cylindrical vector beams.

We use a rigorous group theoretical method to identify a class of cylindrical vector beams that can selectively excite the plasmon modes of axially symmetric plasmonic structures. Our choice of the single V-point cylindrical vector beams as the basis to decompose cylindrical beams dramatically simplifies the symmetry analysis in the group theory framework. With numerical simulations, we demonstrate that any plasmon eigenmodes, bright or dark, can be selectively excited individually or jointly. A straightforward protocol to get access to the desired plasmon mode using symmetry coupling is presented.

Observation of the rotational Doppler shift with spatially incoherent light.

The rotational Doppler shift (RDS) is typically measured by illuminating a rotating target with a laser prepared in a simple, known orbital angular momentum (OAM) superposition. We establish theoretically and experimentally that detecting the rotational Doppler shift does not require the incident light to have a well-defined OAM spectrum but instead requires well-defined correlations within the OAM spectrum. We demonstrate measurement of the rotational Doppler shift using spatially incoherent light.

High extinction ratio, low insertion loss, optical switch based on an electrowetting prism.

An optical switch based on an electrowetting prism coupled to a multimode fiber has demonstrated a large extinction ratio with speeds up to 300 Hz. Electrowetting prisms provide a transmissive, low power, and compact alternative to conventional free-space optical switches, with no moving parts. The electrowetting prism performs beam steering of ±3° with an extinction ratio of 47 dB between the ON and OFF states and has been experimentally demonstrated at scanning frequencies of 100-300 Hz. The optical design is modeled in Zemax to account for secondary rays created at each surface interface (without scattering). Simulations predict 50 dB of extinction, in good agreement with experiment.

Third-harmonic generation enhancement in an ITO nanoparticle-coated microresonator.

We report a ∼3-fold enhancement of third-harmonic generation (THG) conversion efficiency using indium tin oxide (ITO) nanoparticles on the surface of an ultra-high-Q silica microsphere. This is one of the largest microcavity-based THG enhancements reported. Phase-matching and spatial mode overlap are explored numerically to determine the microsphere radius (∼29 µm) and resonant mode numbers that maximize THG. Furthermore, the ITO nanoparticles are uniformly bonded to the cavity surface by drop-casting, eliminating the need for complex fabrication. The significant improvement in THG conversion efficiency establishes functionalized ITO microcavities as a promising tool for broadband frequency conversion, nonlinear enhancement, and applications in integrated photonics.

Detection technique effect on rotational Doppler measurements.

There are two established methods for measuring rotational Doppler shift: (1) heterodyne and (2) fringe. We identify a key distinction, that only the heterodyne method is sensitive to the rotating object's phase, which results in significant differences in the signal-to-noise ratio (SNR) when measuring multiple rotating particles. When used to measure randomly distributed rotating particles, the fringe method produces its strongest SNR when a single particle is present and its SNR tends to zero as the number of particles increases, whereas the heterodyne method's SNR increases proportionally to the number of particles in the beam.

Calibration and characteristics of an electrowetting laser scanner.

We present a calibration method to correct for fabrication variations and optical misalignment in a two-dimensional electrowetting scanner. These scanners are an attractive option due to being transmissive, nonmechanical, having a large scan angle (±13.7°), and low power consumption (µW). Fabrication imperfections lead to non-uniform deposition of the dielectric or hydrophobic layer which results in actuation inconsistency of each electrode. To demonstrate our calibration method, we scan a 5 × 5 grid target using a four-electrode electrowetting prism and observe a pincushion type optical distortion in the imaging plane. Zemax optical simulations verify that the symmetric distortion is due to the projection of a radial scanning surface onto a flat imaging plane, while in experiment we observe asymmetrical distortion due to optical misalignment and fabrication imperfections. By adjusting the actuation voltages through an iterative Delaunay triangulation interpolation method, the distortion is corrected and saw an improvement in the mean error across 25 grid points from 43 µm (0.117°) to 10 µm (0.027°).

Enhancement of third-order nonlinearity of thermally evaporated GeSbSe waveguides through annealing.

Chalcogenides are a promising platform for infrared nonlinear optics but are susceptible to structural changes during fabrication that affect their linear and nonlinear optical properties. We analyze the structure and optical properties of thermally evaporated and annealed chalcogenide films. Thermally evaporated Ge28Sb12Se60 has an increased selenium content, bandgap, and concentration of heteropolar bonds. The concentration of heteropolar bonds can be reduced by annealing above the glass transition temperature, resulting in improved optical nonlinearity. We demonstrate a 4-fold enhancement of third-order nonlinearity in Ge28Sb12Se60 chalcogenide waveguides by thermal annealing and a decrease in propagation loss from 2.5 dB/cm to 1 dB/cm as an added benefit.

Lidar system with nonmechanical electrowetting-based wide-angle beam steering.

A light detection and ranging (lidar) system with ±90° of steering based on an adaptive electrowetting-based prism for nonmechanical beam steering has been demonstrated. Electrowetting-based prisms provide a transmissive, low power, and compact alternative to conventional adaptive optics as a nonmechanical beam scanner. The electrowetting prism has a steering range of ±7.8°. We demonstrate a method to amplify the scan angle to ±90° and perform a one-dimensional scan in a lidar system.

Characterizing vortex beams from a spatial light modulator with collinear phase-shifting holography.

We demonstrate collinear phase-shifting holography for measuring complex optical modes of twisted light beams with orbital angular momentum (OAM) generated by passing a laser through a spatial light modulator (SLM). This technique measures the mode along the direction of propagation from the SLM and requires no additional optics, so it can be used to aid alignment of the SLM, to efficiently check for the effects of beam wander, and to fully characterize generated beams before use in other experiments. Optimized error analysis and careful SLM alignment allow us to generate and measure OAM with purity as high as 99.9%.

Liquid Combination with High Refractive Index Contrast and Fast Scanning Speeds for Electrowetting Adaptive Optics.

Electrowetting adaptive optical devices are versatile, with applications ranging from microscopy to remote sensing. The choice of liquids in these devices governs its tuning range, temporal response, and wavelength of operation. We characterized a liquid system, consisting of 1-phenyl-1-cyclohexene and deionized water, using both lens and prism devices. The liquids have a large contact angle tuning range, from 173 to 60°. Measured maximum scanning angle was realized at ±13.7° in a two-electrode prism, with simulation predictions of ±18.2°. The liquid's switching time to reach 90° contact angle from rest, in a 4 mm diameter device, was measured at 100 ms. Steady-state scanning with a two-electrode prism showed linear and consistent scan angles of ±4.8° for a 20 V differential between the two electrodes, whereas beam scanning using the liquid system achieved ±1.74° at 500 Hz for a voltage differential of 80 V.

High quality chalcogenide-silica hybrid wedge resonator.

Chalcogenide glasses, with high nonlinearity and low loss, have captured research interest as an integrated device platform for near- and mid-infrared nonlinear optical devices. Compared to silicon-based microfabrication technologies, chalcogenide fabrication processes are less mature and a major challenge is obtaining high quality devices. In this paper, we report a hybrid resonator design leveraging a high quality silica resonator to achieve high Q factors with chalcogenide. The device is composed of a thin chalcogenide layer deposited on a silica wedge resonator. The hybrid resonators exhibit loaded Q factors up to 1.5 x 105 in the near-infrared region. We also measured the effective thermo-optic coefficient of the device to be 5.5x10-5/K, which agreed well with the bulk value. Thermal drift of the device can be significantly reduced by introducing a titanium dioxide cladding layer with a negative thermo-optic coefficient.

Numerical analysis of wavefront aberration correction using multielectrode electrowetting-based devices.

We present numerical simulations of multielectrode electrowetting devices used in a novel optical design to correct wavefront aberration. Our optical system consists of two multielectrode devices, preceded by a single fixed lens. The multielectrode elements function as adaptive optical devices that can be used to correct aberrations inherent in many imaging setups, biological samples, and the atmosphere. We are able to accurately simulate the liquid-liquid interface shape using computational fluid dynamics. Ray tracing analysis of these surfaces shows clear evidence of aberration correction. To demonstrate the strength of our design, we studied three different input aberrations mixtures that include astigmatism, coma, trefoil, and additional higher order aberration terms, with amplitudes as large as one wave at 633 nm.