The Impact of Surface Discontinuities on MEMS Thermal Wind Sensor Accuracy.

A 2D calorimetric flow transducer is used to study distortions of the flow velocity field induced by small surface discontinuities around the chip. The transducer is incorporated into a matching recess of a PCB enabling wire-bonded interconnections to the transducer. The chip mount forms one wall of a rectangular duct. Two shallow recesses at opposite edges of the transducer chip are required for wired interconnections. They distort the flow velocity field inside the duct and deteriorate the flow setting precision. In-depth 3D-FEM analyses of the setup revealed that both the local flow direction as well as the surface-near distribution of the flow velocity magnitude deviate significantly from the ideal guided flow case. With a temporary leveling of the indentations, the impact of the surface imperfections could be largely suppressed. Including a yaw setting uncertainty of about ±0.5°, a peak-to-peak deviation of 3.8° of the transducer output from the intended flow direction was achieved with a mean flow velocity of 5 m/s in the duct corresponding to a shear rate of 2.4·104 s-1 at the chip surface. In view of the practical compromises, the measured deviation compares well with the peak-to-peak value of 1.74° predicted by previous simulations.

Optical Angular Sensor for Space Applications.

This paper describes a silicon/glass sensing structure for axial angle measurements. The presented optical angular sensor can statically measure the angle φ of any apparatus depending on the torsion of the optical component against the sensor housing. Core element of the sensor is an optical medium with an etched structure, which diffracts light from an LED according to the Fresnel equation. Two photodiodes, one for angle determination and one as reference, conduct the measurement. Hence, the signal splits up into two parts: one part transmits trough the optical system and the second part (the reflected wave) is used as reference signal. For self-referencing purposes, the wavelength spectrum of the LED has its maximum in the infrared regime near to the wavelength where silicon gets transparent (l~1000 nm). More precisely, torsion angle and light intensity show a dependency given by Tstot if a straight etching structure (refraction profile) is used. To avoid multiple reflections of light, a coating layer restricts the illuminated area in the optical medium. With this setting a resolution of 0.05-degree rotation angle has been achieved and by stacking the construction, the sensor can measure an angular range from 30° up to 270°.

Noninvasive 3D Field Mapping of Complex Static Electric Fields.

Many upcoming experiments in antimatter research require low-energy antiproton beams. With a kinetic energy in the order of 100 keV, the standard magnetic components to control and focus the beams become less effective. Therefore, electrostatic components are being developed and installed in transfer lines and storage rings. However, there is no equipment available to precisely map and check the electric field generated by these elements. Instead, one has to trust in simulations and, therefore, depend on tight fabrication tolerances. Here we present, for the first time, a noninvasive way to experimentally probe the electrostatic field in a 3D volume with a microsensor. Using the example of an electrostatic quadrupole focusing component, we find excellent agreement between a simulated and real field. Furthermore, it is shown that the spatial resolution of the probe is limited by the electric field curvature which is almost zero for the quadrupole. With a sensor resolution of 61 V/m/sqrt[Hz], the field deviation due to a noncompliance with the tolerances can be resolved. We anticipate that this compact and practical field strength probe will be relevant also for other scientific and technological disciplines such as atmospheric electricity or safeguarding near power infrastructure.

FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout.

This paper reports on a design and simulation study aiming at high-accuracy 2D micromachined thermal flow transducers. The scope is restricted to micromachined devices featuring a square-shaped membrane incorporating central symmetric thin-film devices. A microthermistor array probed spatial excess temperature variations while the main heat supply was alternatively established by optional heating resistors or by pronounced self-heating of the thermistor devices. Proper device designs enable leading edge transducer performance without sophisticated signal conditioning schemes. We found that a high azimuthal uniformity of flow magnitude transduction is tantamount to a precise azimuthal accuracy. The most advanced result gave a maximum azimuthal aberration of 0.17 and 1.7 degrees for 1 m/s and 10 m/s, respectively, while the corresponding magnitude uniformity amounted to 0.07% and 0.5%. Such excellent specifications exceed the need of ordinary meteorological applications by far. However, they are essential for, e.g., precise non-contact measurements of 2D relative movements of two quasi-planar surfaces via the related Couette flow in intermediate air gaps. The simulations predicted significantly better device characteristics than achieved by us in first experiments. However, this gap could be attributed to imperfect control of the flow velocity field by the measurement setup.

Development and Characterization of Thermal Flow Sensors for Non-Invasive Measurements in HVAC Systems.

We investigated non-invasive flow rate measurements in heating, ventilation, and air conditioning (HVAC) systems utilizing thermal transduction instead of commonly used ultrasonic techniques. The proposed thermal flow transduction comprises two temperature sensors and a heater, all mounted non-invasively on the outer surface of metal-pipes and, therefore, not disturbing the fluid flow inside. One temperature sensor measures the heater temperature, whereas the other one, mounted upstream of the heater, follows the fluid temperature for reference. The temperature difference (i.e., the heater excess temperature) depends on the fluid flow velocity and can be used to derive the mean volume flow inside the pipe. Experimental characterizations were conducted using two sensor prototypes. Beside output characteristics, other main issues such as dynamic behavior and noise density were investigated in detail. Special attention was paid to error compensation allowing measurements within a large range of fluid temperatures. Measurement results confirm the feasibility of this approach, however with some constraints regarding response time.

A Thermal Flow Sensor Based on Printed Circuit Technology in Constant Temperature Mode for Various Fluids.

We present a thermal flow sensor designed for measuring air as well as water flow velocities in heating, ventilation, and air conditioning (HVAC) systems. The sensor is designed to integrate the flow along the entire diameter of the pipe also quantifying the volume flow rate of the streaming fluid where the calorimetric principle in constant temperature operation is utilized as a readout method. In the constant temperature mode, a controller keeps a specific excess temperature between sensing elements at a constant level resulting in a flow dependent heater voltage. To achieve cost-effective sensors, the fabrication of the transducer is fully based on printed circuit board technology allowing low-cost mass production with different form factors. In addition, 2D-FEM simulations were carried out in order to predict the sensor characteristic of envisaged setups. The simulation enables a fast and easy way to evaluate the sensor's behaviour in different fluids. The results of the FEM simulations are compared to measurements in real environments, proving the credibility of the model.

Dual Resonator MEMS Magnetic Field Gradiometer.

Accurate knowledge of the spatial magnetic field distribution is necessary when measuring field gradients. Therefore, a MEMS magnetic field gradiometer is reported, consisting of two identical, but independent laterally oscillating masses on a single chip. The sensor is actuated by Lorentz force and read out by modulation of the light flux passing through stationary and moving arrays of the chip. This optical readout decouples the transducer from the electronic components. Both phase and intensity are recorded which reveals information about the uniformity of the magnetic field. The magnetic flux density is measured simultaneously at two points in space and the field gradient is evaluated locally. The sensor was characterised at ambient pressure by performing frequency and magnitude response measurements with coil and various different permanent magnet arrangements, resulting in a responsivity of 35.67 V/T and detection limit of 3.07 µT/ Hz (@ 83 Hz ENBW). The sensor is compact, offers a large dynamic measurement range and can be of low-cost by using conventional MEMS batch fabrication technology.

MEMS Flow Sensors Based on Self-Heated aGe-Thermistors in a Wheatstone Bridge.

A thermal flow transduction method combining the advantages of calorimetric and hot-film transduction principles is developed and analyzed by Finite Element Method (FEM) simulations and confirmed experimentally. The analyses include electrothermal feedback effects of current driven NTC thermistors. Four thin-film germanium thermistors acting simultaneously as heat sources and as temperature sensors are embedded in a micromachined silicon-nitride membrane. These devices form a self-heated Wheatstone bridge that is unbalanced by convective cooling. The voltage across the bridge and the total dissipated power are exploited as output quantities. The used thin-film thermistors feature an extremely high temperature sensitivity. Combined with properly designed resistance values, a power demand in sub-1mW range enables efficient gas-flow transduction, as confirmed by measurements. Two sensor configurations with different arrangements of the membrane thermistors were examined experimentally. Moreover, we investigated the influence of different layouts on the rise time, the sensitivity, and the usable flow range by means of two-dimensional finite element simulations. The simulation results are in reasonable agreement with corresponding measurement data confirming the basic assumptions and modeling approach.

Sizing of metallic nanoparticles confined to a microfluidic film applying dark-field particle tracking.

We present Brownian motion-based sizing of individual submicron and nanoparticles in liquid samples. The advantage of our approach is that particles can freely diffuse in a 10 µm thin liquid film and are therefore always within the focal depth of a low numerical aperture objective. Particles are visualized with dark-field microscopy, and the resulting diffraction-limited spots are tracked over a wide field of view of several hundred micrometers. Consequently, it is ascertained that long 2D trajectories are acquired, which leads to significantly increased particle sizing precision. The hydrodynamic diameters of metal particles with nominal sizes ranging from 70 to 200 nm in aqueous solution were determined by tracking for up to 2 min, and it was investigated if the diffusion characteristics were influenced by the proximity of substrates. This was not the case, and the estimated diameters were in good agreement with the values obtained by electron microscopy, thus validating the particle sizing principle. Furthermore, we measured a sample mixture to demonstrate the distinction of close particle sizes and performed the conjugation of a model protein (BSA) on the nanoparticle surface. An average increase in the radius of 9 nm was determined, which corresponds to the size of the BSA protein.

An acoustic transmission sensor for the longitudinal viscosity of fluids.

Physical fluid parameters like viscosity, mass density and sound velocity can be determined utilizing ultrasonic sensors. We introduce the concept of a recently devised transmission based sensor utilizing pressure waves to determine the longitudinal viscosity, bulk viscosity, and second coefficient of viscosity of a sample fluid in a test chamber. A model is presented which allows determining these parameters from measurement values by means of a fit. The setup is particularly suited for liquids featuring higher viscosities for which measurement data are scarcely available to date. The setup can also be used to estimate the sound velocity in a simple manner from the phase of the transfer function.

Microfluidic biosensing systems using magnetic nanoparticles.

In recent years, there has been rapidly growing interest in developing hand held, sensitive and cost-effective on-chip biosensing systems that directly translate the presence of certain bioanalytes (e.g., biomolecules, cells and viruses) into an electronic signal. The impressive and rapid progress in micro- and nanotechnology as well as in biotechnology enables the integration of a variety of analytical functions in a single chip. All necessary sample handling and analysis steps are then performed within the chip. Microfluidic systems for biomedical analysis usually consist of a set of units, which guarantees the manipulation, detection and recognition of bioanalytes in a reliable and flexible manner. Additionally, the use of magnetic fields for performing the aforementioned tasks has been steadily gaining interest. This is because magnetic fields can be well tuned and applied either externally or from a directly integrated solution in the biosensing system. In combination with these applied magnetic fields, magnetic nanoparticles are utilized. Some of the merits of magnetic nanoparticles are the possibility of manipulating them inside microfluidic channels by utilizing high gradient magnetic fields, their detection by integrated magnetic microsensors, and their flexibility due to functionalization by means of surface modification and specific binding. Their multi-functionality is what makes them ideal candidates as the active component in miniaturized on-chip biosensing systems. In this review, focus will be given to the type of biosening systems that use microfluidics in combination with magnetoresistive sensors and detect the presence of bioanalyte tagged with magnetic nanoparticles.

Sensing the characteristic acoustic impedance of a fluid utilizing acoustic pressure waves.

Ultrasonic sensors can be used to determine physical fluid parameters like viscosity, density, and speed of sound. In this contribution, we present the concept for an integrated sensor utilizing pressure waves to sense the characteristic acoustic impedance of a fluid. We note that the basic setup generally allows to determine the longitudinal viscosity and the speed of sound if it is operated in a resonant mode as will be discussed elsewhere. In this contribution, we particularly focus on a modified setup where interferences are suppressed by introducing a wedge reflector. This enables sensing of the liquid's characteristic acoustic impedance, which can serve as parameter in condition monitoring applications. We present a device model, experimental results and their evaluation.

Evaluation of Microfluidic Ceiling Designs for the Capture of Circulating Tumor Cells on a Microarray Platform.

The capture of circulating tumor cells (CTCs) is still a challenging application for microfluidic chips, as these cells are rare and hidden in a huge background of blood cells. Here, different microfluidic ceiling designs in regard to their capture efficiency for CTCs in model experiments and more realistic conditions of blood samples spiked with a clinically relevant amount of tumor cells are evaluated. An optimized design for the capture platform that allows highly efficient recovery of CTCs from size-based pre-enriched samples under realistic conditions is obtained. Furthermore, the viability of captured tumor cells as well as single cell recovery for downstream genomic analysis is demonstrated. Additionally, the authors' findings underline the importance of evaluating rational design rules for microfluidic devices based on theoretical models by application-specific experiments.

Distortion-free measurement of electric field strength with a MEMS sensor.

Small-scale and distortion-free measurement of electric fields is crucial for applications such as surveying atmospheric electrostatic fields, lightning research, and safeguarding areas close to high-voltage power lines. A variety of measurement systems exist, the most common of which are field mills, which work by picking up the differential voltage of the measurement electrodes while periodically shielding them with a grounded electrode. However, all current approaches are either bulky, suffer from a strong temperature dependency, or severely distort the electric field requiring a well-defined surrounding and complex calibration procedures. Here we show that microelectromechanical system (MEMS) devices can be used to measure electric field strength without significant field distortion. The purely passive MEMS devices exploit the effect of electrostatic induction, which is used to generate internal forces that are converted into an optically tracked mechanical displacement of a spring-suspended seismic mass. The devices exhibit resolutions on the order of [Formula: see text] with a measurement range of up to tens of kilovolt per metre in the quasi-static regime (≲ 300 Hz).We also show that it should be possible to achieve resolutions of around [Formula: see text] by fine-tuning of the sensor embodiment. These MEMS devices are compact and could easily be mass produced for wide application.

High-k Dielectric Passivation: Novel Considerations Enabling Cell Specific Lysis Induced by Electric Fields.

A better understanding of the electrodynamic behavior of cells interacting with electric fields would allow for novel scientific insights and would lead to the next generation of cell manipulation, diagnostics, and treatment. Here, we introduce a promising electrode design by using metal oxide high-k dielectric passivation. The thermally generated dielectric passivation layer enables efficient electric field coupling to the fluid sample comprising cells while simultaneously decoupling the electrode ohmically from the electrolyte, allowing for better control and adjustability of electric field effects due to reduced electrochemical reactions at the electrode surface. This approach demonstrates cell-size specific lysis with electric fields in a microfluidic flow-through design resulting in 99.8% blood cell lysis at 6 s exposure without affecting the viability of Gram-positive and Gram-negative bacterial spike-ins. The advantages of this new approach can support next-generation investigations of electrodynamics in biological systems and their exploitation for cell manipulation in multiple fields of medicine, life science, and industry.

Hydrogel-based microfluidic incubator for microorganism cultivation and analyses.

This work presents an array of microfluidic chambers for on-chip culturing of microorganisms in static and continuous shear-free operation modes. The unique design comprises an in-situ polymerized hydrogel that forms gas and reagent permeable culture wells in a glass chip. Utilizing a hydrophilic substrate increases usability by autonomous capillary priming. The thin gel barrier enables efficient oxygen supply and facilitates on-chip analysis by chemical access through the gel without introducing a disturbing flow to the culture. Trapping the suspended microorganisms inside a gel well allows for a much simpler fabrication than in conventional trapping devices as the minimal feature size does not depend on cell size. Nutrients and drugs are provided on-chip in the gel for a self-contained and user-friendly handling. Rapid antibiotic testing in static cultures with strains of Enterococcus faecalis and Escherichia coli is presented. Cell seeding and diffusive medium supply is provided by phaseguide technology, enabling simple operation of continuous culturing with a great flexibility. Cells of Saccharomyces cerevisiae are utilized as a model to demonstrate continuous on-chip culturing.

Single-step design of hydrogel-based microfluidic assays for rapid diagnostics.

For the first time we demonstrate a microfluidic platform for the preparation of biosensing hydrogels by in situ polymerization of polyethyleneglycol diacrylate (PEG-DA) in a single step. Capillary pressure barriers enable the precise formation of gel microstructures for fast molecule diffusion. Parallel arrangement of these finger structures allows for macroscopic and standard equipment readout methods. The analyte automatically fills the space in between the gel fingers by the hydrophilic nature of the gel. Introducing the functional structures in the chip fabrication allows for rapid assay customization by making surface treatment, gel curing mask alignment and washing steps obsolete. Simple handling and functionality are illustrated by assays for matrix metalloproteinase, an important factor in chronic wound healing. Assays for total protein concentration and cell counts are presented, demonstrating the possibilities for a wide range of fast and simple diagnostics.

Detection of Dissolved Lactose Employing an Optofluidic Micro-System.

In this work, a novel optofluidic sensor principle is employed for a non-invasive and label-free characterization of lactose containing liquid samples. Especially for medicine and food industry, a simple, fast and accurate determination of the amount of lactose in various products is highly desirable. The presented system exploits the impact of dissolved molecules on the refractive index for sample characterization. On the optofluidic chip, a microfluidic channel filled with the analyte is hit by slightly diverging laser light. The center incident angle of the beam on-chip is set close to the critical angle for total internal reflection. Both the reflected and the transmitted light signals are recorded at the solid-liquid interface. The ratio of those two signals is then used as representative value for the analyte. Using this principle, lactose containing samples were differentiated based on their concentrations at a step size of 10 mmol/L. The use of the signals ratio instead of a single signal approach improves the stability of the system significantly, allowing for higher resolutions to be achieved. Furthermore, the fabrication of the devices in PDMS ensures biocompatibility and provides low absorbance of light in the visible range.

Miniaturized sensors for the viscosity and density of liquids--performance and issues.

This paper reviews our recent work on vibrating sensors for the physical properties of fluids, particularly viscosity and density. Several device designs and the associated properties, specifically with respect to the sensed rheological domain and the onset of non-Newtonian behavior, are discussed.