RESUMEN
This publisher's note contains corrections to Opt. Lett.46, 4797 (2021)OPLEDP0146-959210.1364/OL.440361.
RESUMEN
A novel, to the best of our knowledge, mid-infrared chalcogenide (ChG) on magnesium fluoride (MgF2) waveguide gas sensor was fabricated by using the lift-off method. MgF2 was used as a lower cladding layer to increase the external confinement factor for enhancing light-gas interaction. Wavelength modulation spectroscopy (WMS) was used in carbon dioxide (CO2) detection at the wavelength of 4319 nm (2315.2cm-1). The limit of detection for the 1-cm-long sensing waveguide based on WMS is â¼0.3%, which is >8 times lower than the same sensor using direct absorption spectroscopy (DAS). The combination of WMS with the waveguide gas sensor provides a new measurement scheme for the performance improvement of on-chip gas detection.
RESUMEN
The reported chalcogenide (ChG) rectangular waveguide sensors with a small evanescent field need a large waveguide length to obtain an enhanced light-gas interaction effect. To make such sensors compact and improve the light-gas interaction effect, a microcavity-enhanced absorption spectroscopy technique for methane (CH4) detection was proposed using a mid-infrared chalcogenide/silica-on-fluoride horizontal slot-waveguide racetrack resonator. For the horizontal slot waveguide, an equivalent sensor model (ESM) and related formulations were proposed to simplify the analysis of the racetrack resonator sensor model (RRSM), and the ESM was verified through a comparison between the theoretical result of ESM and the simulation result of RRSM based on the finite element method (FEM). Due to the use of a chalcogenide/silica-on-fluoride horizontal slot-waveguide structure, the waveguide parameters were optimized to obtain a high power confinement factor of 44.63% at the wavelength of 3291â nm, which is at least 5 times higher than other ChG rectangular waveguides. The waveguide length is reduced at least 30 times due to the use of the optimized chalcogenide/silica-on-fluoride horizontal slot-waveguide and racetrack resonator. The limit of detection (LoD) is 3.87â ppm with an intrinsic waveguide loss of 3â dB/cm and an amplitude coupling ratio of 0.1 for the resonator. The response time is less than 5 µs due to the small light-gas interaction area. The influences of environmental pressure and waveguide intrinsic loss on the sensing characteristics were discussed. The compact racetrack resonator sensor structure and equivalent analytical model can also be adopted in the design of an on-chip waveguide sensor for the detection of other gas species.
RESUMEN
A surface-enhanced infrared absorption spectroscopic chalcogenide waveguide sensor based on the silver island film was proposed for the first time to enhance the sensing performance in both liquid and gas phases. The chalcogenide waveguide sensor was fabricated by the lift-off and oblique angle deposition methods. The surface morphology of the silver island film with different thicknesses was characterized. The absorption of ethanol (liquid) at a wavelength of 1654 nm and that of methane (gas) at 3291 nm were measured using the fabricated chalcogenide waveguide sensor. The chalcogenide waveguide sensor integrated with the 1.8 nm-thick silver island film revealed the best sensing performance. With an acceptable increased waveguide loss resulting from the fabrication of the film, the absorbance enhancement factors for ethanol and methane were experimentally obtained to be >1.5 and >2.3, respectively. The 1σ limit of detection of methane for the sensor integrated with the 1.8 nm-thick silver island film was â¼4.11% for an averaging time of 0.2 s. The mathematic relation between the absorbance enhancement factor and the waveguide loss was derived for sensing performance improvement. Also, the proposed rectangular waveguide sensor provides an idea for the design of a sensor-on-a-chip instead of other waveguide sensors with a high requirement of fabrication accuracy, for example, a slot waveguide or a photonic crystal waveguide.