The Impact of Surface Discontinuities on MEMS Thermal Wind Sensor Accuracy.

A 2D calorimetric flow transducer is used to study distortions of the flow velocity field induced by small surface discontinuities around the chip. The transducer is incorporated into a matching recess of a PCB enabling wire-bonded interconnections to the transducer. The chip mount forms one wall of a rectangular duct. Two shallow recesses at opposite edges of the transducer chip are required for wired interconnections. They distort the flow velocity field inside the duct and deteriorate the flow setting precision. In-depth 3D-FEM analyses of the setup revealed that both the local flow direction as well as the surface-near distribution of the flow velocity magnitude deviate significantly from the ideal guided flow case. With a temporary leveling of the indentations, the impact of the surface imperfections could be largely suppressed. Including a yaw setting uncertainty of about ±0.5°, a peak-to-peak deviation of 3.8° of the transducer output from the intended flow direction was achieved with a mean flow velocity of 5 m/s in the duct corresponding to a shear rate of 2.4·104 s-1 at the chip surface. In view of the practical compromises, the measured deviation compares well with the peak-to-peak value of 1.74° predicted by previous simulations.

FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout.

This paper reports on a design and simulation study aiming at high-accuracy 2D micromachined thermal flow transducers. The scope is restricted to micromachined devices featuring a square-shaped membrane incorporating central symmetric thin-film devices. A microthermistor array probed spatial excess temperature variations while the main heat supply was alternatively established by optional heating resistors or by pronounced self-heating of the thermistor devices. Proper device designs enable leading edge transducer performance without sophisticated signal conditioning schemes. We found that a high azimuthal uniformity of flow magnitude transduction is tantamount to a precise azimuthal accuracy. The most advanced result gave a maximum azimuthal aberration of 0.17 and 1.7 degrees for 1 m/s and 10 m/s, respectively, while the corresponding magnitude uniformity amounted to 0.07% and 0.5%. Such excellent specifications exceed the need of ordinary meteorological applications by far. However, they are essential for, e.g., precise non-contact measurements of 2D relative movements of two quasi-planar surfaces via the related Couette flow in intermediate air gaps. The simulations predicted significantly better device characteristics than achieved by us in first experiments. However, this gap could be attributed to imperfect control of the flow velocity field by the measurement setup.

Development and Characterization of Thermal Flow Sensors for Non-Invasive Measurements in HVAC Systems.

We investigated non-invasive flow rate measurements in heating, ventilation, and air conditioning (HVAC) systems utilizing thermal transduction instead of commonly used ultrasonic techniques. The proposed thermal flow transduction comprises two temperature sensors and a heater, all mounted non-invasively on the outer surface of metal-pipes and, therefore, not disturbing the fluid flow inside. One temperature sensor measures the heater temperature, whereas the other one, mounted upstream of the heater, follows the fluid temperature for reference. The temperature difference (i.e., the heater excess temperature) depends on the fluid flow velocity and can be used to derive the mean volume flow inside the pipe. Experimental characterizations were conducted using two sensor prototypes. Beside output characteristics, other main issues such as dynamic behavior and noise density were investigated in detail. Special attention was paid to error compensation allowing measurements within a large range of fluid temperatures. Measurement results confirm the feasibility of this approach, however with some constraints regarding response time.

A Thermal Flow Sensor Based on Printed Circuit Technology in Constant Temperature Mode for Various Fluids.

We present a thermal flow sensor designed for measuring air as well as water flow velocities in heating, ventilation, and air conditioning (HVAC) systems. The sensor is designed to integrate the flow along the entire diameter of the pipe also quantifying the volume flow rate of the streaming fluid where the calorimetric principle in constant temperature operation is utilized as a readout method. In the constant temperature mode, a controller keeps a specific excess temperature between sensing elements at a constant level resulting in a flow dependent heater voltage. To achieve cost-effective sensors, the fabrication of the transducer is fully based on printed circuit board technology allowing low-cost mass production with different form factors. In addition, 2D-FEM simulations were carried out in order to predict the sensor characteristic of envisaged setups. The simulation enables a fast and easy way to evaluate the sensor's behaviour in different fluids. The results of the FEM simulations are compared to measurements in real environments, proving the credibility of the model.

Modeling of Distributed Sensing of Elastic Waves by Fiber-Optic Interferometry.

This paper deals with the transduction of strain accompanying elastic waves in solids by firmly attached optical fibers. Stretching sections of optical fibers changes the time required by guided light to pass such sections. Exploiting interferometric techniques, highly sensitive fiber-optic strain transducers are feasible based on this fiber-intrinsic effect. The impact on the actual strain conversion of the fiber segment's shape and size, as well as its inclination to the elastic wavefront is studied. FEM analyses show that severe distortions of the interferometric response occur when the attached fiber length spans a noticeable fraction of the elastic wavelength. Analytical models of strain transduction are presented for typical transducer shapes. They are used to compute input-output relationships for the transduction of narrow-band strain pulses as a function of the mechanical wavelength. The described approach applies to many transducers depending on the distributed interaction with the investigated object.

MEMS Flow Sensors Based on Self-Heated aGe-Thermistors in a Wheatstone Bridge.

A thermal flow transduction method combining the advantages of calorimetric and hot-film transduction principles is developed and analyzed by Finite Element Method (FEM) simulations and confirmed experimentally. The analyses include electrothermal feedback effects of current driven NTC thermistors. Four thin-film germanium thermistors acting simultaneously as heat sources and as temperature sensors are embedded in a micromachined silicon-nitride membrane. These devices form a self-heated Wheatstone bridge that is unbalanced by convective cooling. The voltage across the bridge and the total dissipated power are exploited as output quantities. The used thin-film thermistors feature an extremely high temperature sensitivity. Combined with properly designed resistance values, a power demand in sub-1mW range enables efficient gas-flow transduction, as confirmed by measurements. Two sensor configurations with different arrangements of the membrane thermistors were examined experimentally. Moreover, we investigated the influence of different layouts on the rise time, the sensitivity, and the usable flow range by means of two-dimensional finite element simulations. The simulation results are in reasonable agreement with corresponding measurement data confirming the basic assumptions and modeling approach.