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Nano-Anatase TiO2 for High Performance Optical Humidity Sensing on Chip.
Ghadiry, Mahdiar; Gholami, Mehrdad; Kong, Lai Choon; Yi, Chong Wu; Ahmad, Harith; Alias, Yatima.
Afiliación
  • Ghadiry M; Photonics Research Center, University of Malaya, Kuala Lumpur 50603, Malaysia. mahdiar@um.edu.my.
  • Gholami M; Department of Chemistry, Faculty of Science, University of Malaya, Kuala Lumpur 50603, Malaysia. gholami897@gmail.com.
  • Kong LC; Photonics Research Center, University of Malaya, Kuala Lumpur 50603, Malaysia. laichoonkong@gmail.com.
  • Yi CW; Photonics Research Center, University of Malaya, Kuala Lumpur 50603, Malaysia. WuYi@um.edu.my.
  • Ahmad H; Photonics Research Center, University of Malaya, Kuala Lumpur 50603, Malaysia. Harith@um.edu.my.
  • Alias Y; Department of Chemistry, Faculty of Science, University of Malaya, Kuala Lumpur 50603, Malaysia. Yatima@um.edu.my.
Sensors (Basel) ; 16(1)2015 Dec 29.
Article en En | MEDLINE | ID: mdl-26729115
An on-chip optical humidity sensor using Nano-anatase TiO2 coating is presented here. The coating material was prepared so that the result is in solution form, making the fabrication process quick and simple. Then, the solution was effortlessly spin-coated on an SU8 straight channel waveguide. Investigating the sensitivity and performance (response time) of the device revealed a great linearity in the wide range (35% to 98%) of relative humidity (RH). In addition, a variation of more than 14 dB in transmitted optical power was observed, with a response time of only ~0.7 s. The effect of coating concentration and UV treatment was examined on the performance and repeatability of the sensor. Interesting observations were found, and the attributed mechanisms were described. In addition, the proposed sensor was extensively compared with other state-of-the-art proposed counterparts from the literature and remarkable advantages were found. Since a high sensitivity of ~0.21 dB/%RH and high dynamic performances were demonstrated, this sensor is proposed for use in biomedical applications.
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Texto completo: 1 Bases de datos: MEDLINE Idioma: En Revista: Sensors (Basel) Año: 2015 Tipo del documento: Article País de afiliación: Malasia

Texto completo: 1 Bases de datos: MEDLINE Idioma: En Revista: Sensors (Basel) Año: 2015 Tipo del documento: Article País de afiliación: Malasia