MEMS Young's Modulus and Step Height Measurements With Round Robin Results.

Marshall, Janet; Allen, Richard A; McGray, Craig D; Geist, Jon

Marshall, Janet; Allen, Richard A; McGray, Craig D; Geist, Jon.

Afiliación

Marshall J; Semiconductor Electronics Division, National Institute of Standards and Technology, Gaithersburg, MD 20899-8120.
Allen RA; Semiconductor Electronics Division, National Institute of Standards and Technology, Gaithersburg, MD 20899-8120.
McGray CD; Semiconductor Electronics Division, National Institute of Standards and Technology, Gaithersburg, MD 20899-8120.
Geist J; Semiconductor Electronics Division, National Institute of Standards and Technology, Gaithersburg, MD 20899-8120.

J Res Natl Inst Stand Technol ; 115(5): 303-42, 2010.

Article en En | MEDLINE | ID: mdl-27134790

Palabras clave

Young's modulus; interferometry; microelectromechanical systems; round robin; standard test methods; step height; test structure; vibrometry

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Texto completo: 1 Bases de datos: MEDLINE Tipo de estudio: Guideline Idioma: En Revista: J Res Natl Inst Stand Technol Año: 2010 Tipo del documento: Article

Texto completo

Imprimir

XML

PubMed Links

Buscar en Google

Texto completo: 1 Bases de datos: MEDLINE Tipo de estudio: Guideline Idioma: En Revista: J Res Natl Inst Stand Technol Año: 2010 Tipo del documento: Article