A new setup for localized implantation and live-characterization of keV energy multiply charged ions at the nanoscale.

Guillous, S; Bourin, C; Ban D'Etat, B; Benyagoub, A; Cassimi, A; Feierstein, C; Gardés, E; Giglio, E; Girard, S; Grygiel, C; Houel, A; Lebius, H; Méry, A; Monnet, I; Ramillon, J-M; Rangama, J; Ropars, F; Verzeroli, E; Viteau, M; Delobbe, A

Guillous, S; Bourin, C; Ban D'Etat, B; Benyagoub, A; Cassimi, A; Feierstein, C; Gardés, E; Giglio, E; Girard, S; Grygiel, C; Houel, A; Lebius, H; Méry, A; Monnet, I; Ramillon, J-M; Rangama, J; Ropars, F; Verzeroli, E; Viteau, M; Delobbe, A.

Afiliación

Guillous S; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Bourin C; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Ban D'Etat B; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Benyagoub A; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Cassimi A; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Feierstein C; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Gardés E; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Giglio E; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Girard S; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Grygiel C; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Houel A; Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France.
Lebius H; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Méry A; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Monnet I; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Ramillon JM; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Rangama J; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Ropars F; CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France.
Verzeroli E; Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France.
Viteau M; Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France.
Delobbe A; Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France.

Rev Sci Instrum ; 87(11): 113901, 2016 Nov.

Article en En | MEDLINE | ID: mdl-27910696

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Bases de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2016 Tipo del documento: Article País de afiliación: Francia

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Bases de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2016 Tipo del documento: Article País de afiliación: Francia