High pulsed power VCSEL arrays with polymer microlenses formed by photoacid diffusion.
Opt Express
; 28(14): 20095-20105, 2020 Jul 06.
Article
en En
| MEDLINE
| ID: mdl-32680077
ABSTRACT
We demonstrate millimeters-long VCSEL linear arrays with SU-8 epoxy-based microlenses that are directly patterned and cross-linked on the output apertures by a simple, photoacid-diffusion-aided photolithography technique. The linear arrays are capable of delivering >7 W of peak pulsed output power. By exploiting the photoacid diffusion effect, it is possible to produce a range of microlens structures with height and radius of curvature ranging from approximately ten to tens of microns. Simulation and experimental results show that the far-field beam divergence can be reduced by a factor of up to 7 in VCSELs integrated with optimal microlens dimensions.
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MEDLINE
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En
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Opt Express
Asunto de la revista:
OFTALMOLOGIA
Año:
2020
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Article