Fully Bottom-Up Waste-Free Growth of Ultrathin Silicon Wafer via Self-Releasing Seed Layer.

Hong, Ji-Eun; Lee, Yonghwan; Mo, Sung-In; Jeong, Hye-Seong; An, Jeong-Ho; Song, Hee-Eun; Oh, Jihun; Bang, Junhyeok; Oh, Joon-Ho; Kim, Ka-Hyun

Hong, Ji-Eun; Lee, Yonghwan; Mo, Sung-In; Jeong, Hye-Seong; An, Jeong-Ho; Song, Hee-Eun; Oh, Jihun; Bang, Junhyeok; Oh, Joon-Ho; Kim, Ka-Hyun.

Afiliación

Hong JE; Ulsan Advanced Energy Technology R&D Center, Korea Institute of Energy Research, Ulsan, 44776, South Korea.
Lee Y; Convergence Materials Research Center, Innovative Technology Research Division, Gumi Electronics and Information Technology Research Institute (GERI), Gumi, 39171, South Korea.
Mo SI; Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, South Korea.
Jeong HS; Ulsan Advanced Energy Technology R&D Center, Korea Institute of Energy Research, Ulsan, 44776, South Korea.
An JH; Ulsan Advanced Energy Technology R&D Center, Korea Institute of Energy Research, Ulsan, 44776, South Korea.
Song HE; Department of Physics, Chungbuk National University, Cheongju, 28644, South Korea.
Oh J; Ulsan Advanced Energy Technology R&D Center, Korea Institute of Energy Research, Ulsan, 44776, South Korea.
Bang J; Photovoltaics Laboratory, Korea Institute of Energy Research, Daejeon, 34129, South Korea.
Oh JH; Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, South Korea.
Kim KH; Department of Physics, Chungbuk National University, Cheongju, 28644, South Korea.

Adv Mater ; 33(41): e2103708, 2021 Oct.

Article en En | MEDLINE | ID: mdl-34476855

Palabras clave

epitaxial Si; kerfless wafer fabrication; self-releasing layer; single-batch reactor; ultrathin Si

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Texto completo: 1 Bases de datos: MEDLINE Idioma: En Revista: Adv Mater Asunto de la revista: BIOFISICA / QUIMICA Año: 2021 Tipo del documento: Article País de afiliación: Corea del Sur

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