A Sensitive and Flexible Capacitive Pressure Sensor Based on a Porous Hollow Hemisphere Dielectric Layer.

Cui, Haoao; Liu, Yijian; Tang, Ruili; Ren, Jie; Yao, Liang; Cai, Yuhao; Chen, Da

Cui, Haoao; Liu, Yijian; Tang, Ruili; Ren, Jie; Yao, Liang; Cai, Yuhao; Chen, Da.

Afiliación

Cui H; Laboratory for Intelligent Flexible Electronics, College of Electronic and Information Engineering, Shandong University of Science and Technology, Qingdao 266590, China.
Liu Y; Laboratory for Intelligent Flexible Electronics, College of Electronic and Information Engineering, Shandong University of Science and Technology, Qingdao 266590, China.
Tang R; Laboratory for Intelligent Flexible Electronics, College of Electronic and Information Engineering, Shandong University of Science and Technology, Qingdao 266590, China.
Ren J; Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 100192, China.
Yao L; Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 100192, China.
Cai Y; Laboratory for Intelligent Flexible Electronics, College of Electronic and Information Engineering, Shandong University of Science and Technology, Qingdao 266590, China.
Chen D; Laboratory for Intelligent Flexible Electronics, College of Electronic and Information Engineering, Shandong University of Science and Technology, Qingdao 266590, China.

Micromachines (Basel) ; 14(3)2023 Mar 16.

Article en En | MEDLINE | ID: mdl-36985069

Palabras clave

capacitive pressure sensors; groove; high sensitivity; porous structure; salt template method

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Texto completo: 1 Bases de datos: MEDLINE Tipo de estudio: Diagnostic_studies Idioma: En Revista: Micromachines (Basel) Año: 2023 Tipo del documento: Article País de afiliación: China

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