Development and Research of the Sensitive Element of the MEMS Gyroscope Manufactured Using SOI Technology.

Naumenko, Danil; Tkachenko, Alexey; Lysenko, Igor; Kovalev, Andrey

Naumenko, Danil; Tkachenko, Alexey; Lysenko, Igor; Kovalev, Andrey.

Afiliación

Naumenko D; Design Center of the Microelectronic Component Base for Artificial Intelligence Systems, Southern Federal University, Taganrog 347922, Russia.
Tkachenko A; Design Center of the Microelectronic Component Base for Artificial Intelligence Systems, Southern Federal University, Taganrog 347922, Russia.
Lysenko I; Design Center of the Microelectronic Component Base for Artificial Intelligence Systems, Southern Federal University, Taganrog 347922, Russia.
Kovalev A; Design Center of the Microelectronic Component Base for Artificial Intelligence Systems, Southern Federal University, Taganrog 347922, Russia.

Micromachines (Basel) ; 14(4)2023 Apr 21.

Article en En | MEDLINE | ID: mdl-37421128

Palabras clave

MEMS; drive mode; electrical part; experimental studies; gyroscope; mechanical part; micromechanical systems; prototype sample; sensitive element; sensitive mode

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Texto completo: 1 Bases de datos: MEDLINE Tipo de estudio: Diagnostic_studies / Prognostic_studies Idioma: En Revista: Micromachines (Basel) Año: 2023 Tipo del documento: Article País de afiliación: Rusia

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