Design of a high counting efficiency sensor for 1.0 cubic feet per minute laser particle counter.

ABSTRACT

Based on the theory of Mie scattering, an optical sensor for a 1.0 cubic feet per minute laser particle counter is developed in this paper. First, an illumination optical path relying on aspherical lens and cylindrical lens for laser shaping was designed, and a narrow optical spot with the illumination in the vertical direction of the photosensitive area approximately distributed as a flat top was obtained. Second, the scattering light path was designed by using the theory of Mie scattering and geometric optics method. Then, the structure of the sampling air path was designed with reference to the principle of Laval nozzle, and the particle flow trajectory was verified by simulation using the fluid dynamics software Ansys Fluent. Finally, the performance of the optical sensor was measured with polystyrene latex (PSL) particles, and the results showed that the counting efficiency of the 0.3 µm particle size channel met the requirement of 50% ± 20% and the 0.5 µm particle size channel met the requirement of 100% ± 10%, which complied with the ISO 21501-4 standard.