Orientation Control of a Two-Dimensional Conductive Metal-Organic Framework Thin Film by a Pyridine Vapor-Assisted Dry Process.

Metal-organic frameworks (MOFs) are attractive materials with periodic pore structures constructed by coordinating metal ions and organic ligands. Recently, Cu3(HHTP)2 (HHTP = 2,3,6,7,10,11-hexahydroxytriphenylene), a two-dimensional conductive MOF, has attracted attention as a promising device material. Owing to the anisotropy of Cu3(HHTP)2 properties, oriented thin films of this MOF are desired for evaluating its physical properties and device integration. To date, wet processes have been used to fabricate Cu3(HHTP)2 films, whereas dry processes are essential for high-quality devices. However, oriented Cu3(HHTP)2 thin films have not yet been fabricated by using dry processes. In this study, we succeed in fabricating an orientation-controlled Cu3(HHTP)2 film on Al2O3 (001) by using a two-step dry process involving (1) the multilayer deposition of copper acetate and HHTP using a vapor deposition system and (2) pyridine vapor-assisted annealing. In-plane and out-of-plane X-ray diffraction patterns confirm the successful fabrication of the (001)-oriented Cu3(HHTP)2 films. The conductivity evaluated by four-probe measurements is 2.6 × 10-2 S cm-1, comparable to that of films fabricated by wet processes. This study provides a novel guideline for the orientation control of two-dimensional conductive MOF thin films via a dry process.

Selective Epitaxial Growth of Ca2NH and CaNH Thin Films by Reactive Magnetron Sputtering under Hydrogen Partial Pressure Control.

Calcium compounds with N and H are promising catalysts for NH3 conversion, and their epitaxial thin films provide a platform to quantitatively understand the catalytic activities. Here we report the selective epitaxial growth of Ca2NH and CaNH thin films by controlling the hydrogen partial pressure (PH2) during reactive magnetron sputtering. We find that the hydrogen charge states can be tuned by PH2: Ca2NH containing H- is formed at PH2 < 0.04 Pa, while CaNH containing H+ is formed at PH2 > 0.04 Pa. In situ plasma emission spectroscopy reveals that the intensity of the Ca atomic emission (∼422 nm) decreases as PH2 increases, suggesting that Ca reacts with H2 and N2 to form Ca2NH at lower PH2, whereas at higher PH2, CaHx is first formed on the target surface and then sputtered to produce CaNH. This study provides a novel route to control the hydrogen charge states in Ca-N-H epitaxial thin films.