Charging processes in low vacuum scanning electron microscopy.

A framework is presented for understanding charging processes in low vacuum scanning electron microscopy. We consider the effects of electric fields generated above and below the specimen surface and their effects on various processes taking place in the system. These processes include the formation of an ionic space charge, field-enhanced electron emission, charge trapping and dissipation, and electron-ion recombination. The physical mechanisms behind each of these processes are discussed, as are the microscope operating conditions under which each process is most effective. Readily observable effects on gas gain curves, secondary electron images, and X-ray spectra are discussed.