Nanomechanical Sensing Using Heater-Integrated Fluidic Resonators.

Micro/nanochannel resonators have been used to measure cells, suspended nanoparticles, or liquids, primarily at or near room temperature while their high temperature operation can offer promising applications such as calorimetric measurements and thermogravimetric analysis. To date, global electrothermal or local photothermal heating mechanisms have been attempted for channel resonators, but both approaches are intrinsically limited by a narrow temperature modulation range, slow heating/cooling, less quantitative heating, or time-consuming optical alignment. Here, we introduce heater-integrated fluidic resonators (HFRs) that enable fast, quantitative, alignment-free, and wide-range temperature modulation and simultaneously offer resistive thermometry and resonant densitometry. HFRs with or without a dispensing nozzle are fabricated, thoroughly characterized, and used for high throughput thermophysical properties measurements, microchannel boiling studies, and atomized spray dispensing. The HFR, without a doubt, opens a new avenue for nanoscale thermal analysis and processing and further encourages the integration of additional functions into channel resonators.

Effect of seasonal succession of algal communities on fouling of MF membrane.

An emerging threat to membrane application is the seasonal proliferation of algae in water sources such as rivers, reservoirs and lakes. This study investigated the link between feed parameters and the membrane performance of a pilot-scale microfiltration (MF) plant for 7 months. The seasonal succession of algae in relation to temperature dynamics was monitored. Temperature-dependent seasonal patterns for algae species were observed. The water temperatures during the dominance of cyanobacteria, especially Microcystis, were relatively higher (over 25 °C) than those during the dominance of diatoms. Diatoms did not much affect membrane performance (less than 0.2 kgf/cm2), however, under the cyanobacterial dominance condition, especially Microcystis sp., transmembrane pressure (TMP) reached up to the limited level (0.4 kgf/cm2) within one month. Concurrently UV absorbance at 254 nm wavelength and dissolved organic carbon values increased significantly during the Microcystis bloom and the build-up rate of TMP increased up to 0.005 kgf/cm2/day. Membrane autopsy also showed that during the dominance of diatom, application of cleaning agents can fully remove foulants on the membrane surface. However, during the dominance of cyanobacteria, there is a lot of Al, Si and organic complex on the fouled membrane, indicating the formation of Al-organic complexes that contributed to the residual membrane fouling. It is suggested that the irrecoverable fouling layer still contained some Al, mostly in complex with organics. Thus, organic matter originated from cyanobacteria may cause a serious impact on membrane fouling by forming the complex with metal ions originated from coagulant.

Absorption characteristics of a metal-insulator-metal nanodisk for solar thermal applications.

Due to their ability to confine light in a sub-wavelength scale and achieve coherent absorption, plasmonic nanostructures have been intensively studied for solar energy harvesting. Although nanoparticles generating localized surface plasmon resonance (LSPR) have been thoroughly studied for application in a direct absorption solar collector (DASC), nanoparticles exciting magnetic polaritons (MP) for use in a DASC have not drawn much attention. In this work, we report a metal-insulator-metal (MIM) nanodisk that can excite MP peaks apart from the LSPR in the solar spectrum. It was found that the MIM nanodisk generates a broader and relatively more uniform absorption band compared to a pure metallic nanodisk. The MP peaks were also found to cause less significant scattering compared to those associated with the LSPR. We finally showed that the peaks induced by the MIM nanodisk are highly tunable by varying the particle dimensions, making the proposed MIM nanodisk a potential candidate for solar thermal applications.

Optical Detection of Small Metabolites for Biological Gas Conversion by using Metal Nanoparticle Monolayers Produced by Capillary-Assisted Transfer.

Detection of small metabolites is essential for monitoring and optimizing biological gas conversion. Currently, such detection is typically done by liquid chromatography with offline sampling. However, this method often requires large equipment with multiple separation columns and is at risk of serious microbial contamination during sampling. Here we propose real-time optical detection of small metabolites using uniform plasmonic nanoparticles monolayers produced by capillary-assisted transfer. We reproducibly fabricate metal nanoparticles monolayers with a diameter of ∼1 mm for the detection of acetate, butyrate, and glucose by a glass capillary tube. Metal nanoparticles monolayers are not only uniform in terms of average interparticle distance but also structurally stable under dynamic fluidic conditions. The monolayers resistant to fluid shear stress with surface-enhanced Raman scattering are able to reversibly monitor the concentration of acetate and sensitively detect acetate and glucose at levels as low as 10 µM, which is more than 2 orders of magnitude lower than the concentration range of typical biological gas conversion. In addition, structurally similar metabolites such as acetate and butyrate, when mixed, become distinguishable by our method.

Soft and Deformable Sensors Based on Liquid Metals.

Liquid metals are one of the most interesting and promising materials due to their electrical, fluidic, and thermophysical properties. With the aid of their exceptional deformable natures, liquid metals are now considered to be electrically conductive materials for sensors and actuators, major constituent transducers in soft robotics, that can experience and withstand significant levels of mechanical deformation. For the upcoming era of wearable electronics and soft robotics, we would like to offer an up-to-date overview of liquid metal-based soft (thus significantly deformable) sensors mainly but not limited to researchers in relevant fields. This paper will thoroughly highlight and critically review recent literature on design, fabrication, characterization, and application of liquid metal devices and suggest scientific and engineering routes towards liquid metal sensing devices of tomorrow.

Super-contrast-enhanced darkfield imaging of nano objects through null ellipsometry.

We rediscover the null ellipsometry principle for an outstanding image-contrast enhancement method for darkfield imaging. Simply by adding polarizers, compensators, and a photodiode sensor to a conventional darkfield imaging system and applying the null principle, Si nano-cylinder structures as small as D20 nm (H20 nm) on non-patterned wafer, and gap defects as small as 14.6 nm and bridge defects as small as 21.9 nm on 40 nm line and 40 nm space patterns (H40 nm), which are invisible in conventional darkfield imaging, can be distinguished from scattered noise. To the best of our knowledge, no method has been successful for identifying such small non-metal (silicon) nanoscale objects with such low magnification (×20) optics.

Weighing nanoparticles in solution at the attogram scale.

Physical characterization of nanoparticles is required for a wide range of applications. Nanomechanical resonators can quantify the mass of individual particles with detection limits down to a single atom in vacuum. However, applications are limited because performance is severely degraded in solution. Suspended micro- and nanochannel resonators have opened up the possibility of achieving vacuum-level precision for samples in the aqueous environment and a noise equivalent mass resolution of 27 attograms in 1-kHz bandwidth was previously achieved by Lee et al. [(2010) Nano Lett 10(7):2537-2542]. Here, we report on a series of advancements that have improved the resolution by more than 30-fold, to 0.85 attograms in the same bandwidth, approaching the thermomechanical noise limit and enabling precise quantification of particles down to 10 nm with a throughput of more than 18,000 particles per hour. We demonstrate the potential of this capability by comparing the mass distributions of exosomes produced by different cell types and by characterizing the yield of self-assembled DNA nanoparticle structures.

Hollow Microtube Resonators via Silicon Self-Assembly toward Subattogram Mass Sensing Applications.

Fluidic resonators with integrated microchannels (hollow resonators) are attractive for mass, density, and volume measurements of single micro/nanoparticles and cells, yet their widespread use is limited by the complexity of their fabrication. Here we report a simple and cost-effective approach for fabricating hollow microtube resonators. A prestructured silicon wafer is annealed at high temperature under a controlled atmosphere to form self-assembled buried cavities. The interiors of these cavities are oxidized to produce thin oxide tubes, following which the surrounding silicon material is selectively etched away to suspend the oxide tubes. This simple three-step process easily produces hollow microtube resonators. We report another innovation in the capping glass wafer where we integrate fluidic access channels and getter materials along with residual gas suction channels. Combined together, only five photolithographic steps and one bonding step are required to fabricate vacuum-packaged hollow microtube resonators that exhibit quality factors as high as ∼ 13,000. We take one step further to explore additionally attractive features including the ability to tune the device responsivity, changing the resonator material, and scaling down the resonator size. The resonator wall thickness of ∼ 120 nm and the channel hydraulic diameter of ∼ 60 nm are demonstrated solely by conventional microfabrication approaches. The unique characteristics of this new fabrication process facilitate the widespread use of hollow microtube resonators, their translation between diverse research fields, and the production of commercially viable devices.

Standoff Mechanical Resonance Spectroscopy Based on Infrared-Sensitive Hydrogel Microcantilevers.

This paper reports a highly sensitive and selective remote chemical sensing platform for surface-adsorbed trace chemicals by using infrared (IR)-sensitive hydrogel microcantilevers. Poly(ethylene glycol) diacrylate (PEG-DA) hydrogel microcantilevers are fabricated by ultraviolet (UV) curing of PEG-DA prepolymer introduced into a poly(dimethylsiloxane) mold. The resonance frequency of a PEG-DA microcantilever exhibits high thermal sensitivity due to IR irradiation/absorption. When a tunable IR laser beam is reflected off a surface coated with target chemical onto a PEG-DA microcantilever, the resonance frequency of the cantilever shifts in proportion to the chemical nature of the target molecules. Dynamic responses of the PEG-DA microcantilever can be obtained in a range of IR wavelengths using a tunable quantum cascade laser that can form the basis for the standoff mechanical resonance spectroscopy (SMRS). Using this SMRS technique, we have selectively detected three compounds, dimethyl methyl phosphonate (DMMP), cyclotrimethylene trinitramine (RDX), and pentaerythritol tetranitrate (PETN), located 4 m away from the PEG-DA microcantilever detector. The experimentally measured limit of detection for PETN trace using the PEG-DA microcantilever was 40 ng/cm2. Overall, the PEG-DA microcantilever is a promising candidate for further exploration and optimization of standoff detection methods.

Differences in and correlations between cognitive abilities and brain volumes in healthy control, mild cognitive impairment, and Alzheimer disease groups.

The purpose of this study is to investigate differences in and correlations between cognitive abilities and brain volumes in healthy control (HC), mild cognitive impairment (MCI), and Alzheimer's disease (AD) groups. The Korean Version of the Consortium to Establish a Registry for Alzheimer's Disease (CERAD-K), which is used to diagnose AD, was used to measure the cognitive abilities of the study subjects, and the volumes of typical brain components related to AD diagnosis-cerebrospinal fluid (CSF), gray matter (GM), and white matter (WM)-were acquired. Of the CERAD-K subtests, the Boston Naming Test distinguished significantly among the HC, MCI, and AD groups. GM and WM volumes differed significantly among the three groups. There was a significant positive correlation between Boston Naming Test scores and GM and WM volumes. In conclusion, the Boston Naming Test and GM and WM brain volumes differentiated the three tested groups accurately, and there were strong correlations between Boston Naming Test scores and GM and WM volumes. These results will help to establish a test method that differentiates the three groups accurately and is economically feasible.

Laser-assisted photothermal heating of a plasmonic nanoparticle-suspended droplet in a microchannel.

The present article reports the numerical and experimental investigations on the laser-assisted photothermal heating of a nanoliter-sized droplet in a microchannel when plasmonic particles are suspended in the droplet. Plasmonic nanoparticles exhibit strong light absorption and scattering upon the excitation of localized surface plasmons (LSPs), resulting in intense and rapid photothermal heating in a microchannel. Computational models are implemented to theoretically verify the photothermal behavior of gold nanoshell (GNS) and gold nanorod (GNR) particles suspended in a liquid microdroplet. Experiments were conducted to demonstrate rapid heating of a sub-100 nL droplet up to 100 °C with high controllability and repeatability. The heating and cooling time to the steady state is on the order of 1 second, while cooling requires less time than heating. The effects of core parameters, such as nanoparticle structure, volumetric concentration, microchannel depth, and laser power density on heating are studied. The obtained results can be integrated into existing microfluidic technologies that demand accurate and rapid heating of microdroplets in a microchannel.

Advanced operation of heated fluidic resonators via mechanical and thermal loss reduction in vacuum.

For simultaneous and quantitative thermophysical measurements of ultrasmall liquid volumes, we have recently developed and reported heated fluidic resonators (HFRs). In this paper, we improve the precision of HFRs in a vacuum by significantly reducing the thermal loss around the sensing element. A vacuum chamber with optical, electrical, and microfluidic access is custom-built to decrease the convection loss by two orders of magnitude under 10-4 mbar conditions. As a result, the measurement sensitivities for thermal conductivity and specific heat capacity are increased by 4.1 and 1.6 times, respectively. When differentiating between deionized water (H2O) and heavy water (D2O) with similar thermophysical properties and ~10% different mass densities, the signal-to-noise ratio (property differences over standard error) for H2O and D2O is increased by 9 and 5 times for thermal conductivity and specific heat capacity, respectively.

Massively parallel electro-optic sampling of space-encoded optical pulses for ultrafast multi-dimensional imaging.

High-speed and high-resolution imaging of surface profiles is critical for the investigation of various structures and mechanical dynamics of micro- and nano-scale devices. In particular, recent emergence of various nonlinear, transient and complex mechanical dynamics, such as anharmonic vibrations in mechanical resonators, has necessitated real-time surface deformation imaging with higher axial and lateral resolutions, speed, and dynamic range. However, real-time capturing of fast and complex mechanical dynamics has been challenging, and direct time-domain imaging of displacements and mechanical motions has been a missing element in studying full-field structural and dynamic behaviours. Here, by exploiting the electro-optic sampling with a frequency comb, we demonstrate a line-scan time-of-flight (TOF) camera that can simultaneously measure the TOF changes of more than 1000 spatial coordinates with hundreds megapixels/s pixel-rate and sub-nanometre axial resolution over several millimetres field-of-view. This unique combination of performances enables fast and precise imaging of both complex structures and dynamics in three-dimensional devices and mechanical resonators.

Correction to: Cellular and biomolecular detection based on suspended microchannel resonators.

[This corrects the article DOI: 10.1007/s13534-021-00207-7.].

PCA-based sub-surface structure and defect analysis for germanium-on-nothing using nanoscale surface topography.

Empty space in germanium (ESG) or germanium-on-nothing (GON) are unique self-assembled germanium structures with multiscale cavities of various morphologies. Due to their simple fabrication process and high-quality crystallinity after self-assembly, they can be applied in various fields including micro-/nanoelectronics, optoelectronics, and precision sensors, to name a few. In contrast to their simple fabrication, inspection is intrinsically difficult due to buried structures. Today, ultrasonic atomic force microscopy and interferometry are some prevalent non-destructive 3-D imaging methods that are used to inspect the underlying ESG structures. However, these non-destructive characterization methods suffer from low throughput due to slow measurement speed and limited measurable thickness. To overcome these limitations, this work proposes a new methodology to construct a principal-component-analysis based database that correlates surface images with empirically determined sub-surface structures. Then, from this database, the morphology of buried sub-surface structure is determined only using surface topography. Since the acquisition rate of a single nanoscale surface micrograph is up to a few orders faster than a thorough 3-D sub-surface analysis, the proposed methodology benefits from improved throughput compared to current inspection methods. Also, an empirical destructive test essentially resolves the measurable thickness limitation. We also demonstrate the practicality of the proposed methodology by applying it to GON devices to selectively detect and quantitatively analyze surface defects. Compared to state-of-the-art deep learning-based defect detection schemes, our method is much effortlessly finetunable for specific applications. In terms of sub-surface analysis, this work proposes a fast, robust, and high-resolution methodology which could potentially replace the conventional exhaustive sub-surface inspection schemes.

Toward attogram mass measurements in solution with suspended nanochannel resonators.

Using suspended nanochannel resonators (SNRs), we demonstrate measurements of mass in solution with a resolution of 27 ag in a 1 kHz bandwidth, which represents a 100-fold improvement over existing suspended microchannel resonators and, to our knowledge, is the most precise mass measurement in liquid today. The SNR consists of a cantilever that is 50 microm long, 10 microm wide, and 1.3 microm thick, with an embedded nanochannel that is 2 microm wide and 700 nm tall. The SNR has a resonance frequency near 630 kHz and exhibits a quality factor of approximately 8000 when dry and when filled with water. In addition, we introduce a new method that uses centrifugal force caused by vibration of the cantilever to trap particles at the free end. This approach eliminates the intrinsic position dependent error of the SNR and also improves the mass resolution by increasing the averaging time for each particle.

Cellular and biomolecular detection based on suspended microchannel resonators.

Suspended microchannel resonators (SMRs) have been developed to measure the buoyant mass of single micro-/nanoparticles and cells suspended in a liquid. They have significantly improved the mass resolution with the aid of vacuum packaging and also increased measurement throughput by fast resonance frequency tracking while target objects travel through the microchannel without stopping or even slowing down. Since their invention, various biological applications have been enabled, including simultaneous measurements of cell growth and cell cycle progression, and measurements of disease associated physicochemical change, to name a few. Extension and advancement towards other promising applications with SMRs are continuously ongoing by adding multiple functionalities or incorporating other complementary analytical metrologies. In this paper, we will thoroughly review the development history, basic and advanced operations, and key applications of SMRs to introduce them to researchers working in biological and biomedical sciences who mostly rely on classical and conventional methodologies. We will also provide future perspectives and projections for SMR technologies.

Complex Exercise Improves Anti-Inflammatory and Anabolic Effects in Osteoarthritis-Induced Sarcopenia in Elderly Women.

We investigated the effects of a 15-week complex exercise program on osteoarthritis and sarcopenia by analyzing anabolic effects and the impact on the activities of daily living (ADLs). Nineteen women aged ≥60 years with sarcopenia (SEG, n = 9) or diagnosed with osteoarthritis with sarcopenia (OSEG, n = 10) were enrolled and underwent an exercise program. Insulin-like growth factor 1 (IGF-1), irisin, myostatin, interleukin-10 (IL-10), and tumor necrosis factor alpha (TNF-a) levels were analyzed pre- and post-intervention. Thigh cross-sectional area (TCSA) was measured pre- and post-intervention via computed tomography. Western Ontario and McMaster Universities Osteoarthritis Index (WOMAC) and Short Physical Performance Battery (SPBB) were assessed pre- and post-interventions to assess ADL. There was a significant interaction effect between SEG and OSEG at the IGF-1 level post-intervention. Irisin increased and myostatin decreased post-intervention in both groups. IL-10 increased and TNF-α decreased post-intervention with a significant interaction effect in the OSEG group. TCSAs increased post-intervention in both groups. There was a significant interaction between the two groups. OSEG showed a greater WOMAC decrease and SPPB increase post-intervention, and there was a significant interaction effect. Combined exercise may be effective in improving biochemical factors, anabolic effects, and ADL in elderly women with osteoarthritis and sarcopenia.

Rapid thermal lysis of cells using silicon-diamond microcantilever heaters.

This paper presents the design and application of microcantilever heaters for biochemical applications. Thermal lysis of biological cells was demonstrated as a specific example. The microcantilever heaters, fabricated from selectively doped single crystal silicon, provide local resistive heating with highly uniform temperature distribution across the cantilevers. Very importantly, the microcantilever heaters were coated with a layer of 100 nm thick electrically insulating ultrananocrystalline diamond (UNCD) layer used for cell immobilization on the cantilever surface. Fibroblast cells or bacterial cells were immobilized on the UNCD/cantilever surfaces and thermal lysis was demonstrated via optical fluorescence microscopy. Upon electrical heating of the cantilever structures to 93 degrees C for 30 seconds, fibroblast cell and nuclear membrane were compromised and the cells were lysed. Over 90% of viable bacteria were also lysed after 15 seconds of heating at 93 degrees C. This work demonstrates the utility of silicon-UNCD heated microcantilevers for rapid cell lysis and forms the basis for other rapid and localized temperature-regulated microbiological experiments in cantilever-based lab on chip applications.

Electrical and thermal coupling to a single-wall carbon nanotube device using an electrothermal nanoprobe.

We utilize a multifunctional atomic force microscope (AFM) cantilever applying highly localized temperature and electric fields to interrogate transport in single-wall carbon nanotube field-effect transistors (CNTFETs). The probe can be operated either in contact with the CNT, in intermittent contact, or as a Kelvin probe, and can independently control the electric field, mechanical force, and temperature applied to the CNT. We modulate current flow in the CNT with tip-applied electric field, and find this field-effect depends upon both cantilever heating and CNT self-heating. CNT transport is also investigated with AFM tip temperature up to 1170 degrees C. Tip-CNT thermal resistance is estimated at 1.6 x 10(7) K/W and decreases with increasing temperature. Threshold force (<100 nN) for reliable contact mode imaging is extracted and used to determine set points for nanotube manipulation, such as displacement or cutting. The ability to measure thermal coupling to a single-molecule electronic device could offer new insights into nanoelectronic devices.