RESUMO
This article proposes a low cross-axis sensitivity resonant MEMS(Micro-Electro-Mechanical Systems) accelerometer that is optimized based on the BP and NSGA-II algorithms. When resonant accelerometers are used in seismic monitoring, automotive safety systems, and navigation applications, high immunity and low cross-axis sensitivity are required. To improve the high immunity of the accelerometer, a coupling structure is introduced. This structure effectively separates the symmetric and antisymmetric mode frequencies of the DETF resonator and prevents mode coupling. To obtain higher detection accuracy and low cross-axis sensitivity, a decoupling structure is introduced. To find the optimal dimensional parameters of the decoupled structure, the BP and NSGA-II algorithms are used to optimize the dimensional parameters of the decoupled structure. The optimized decoupled structure has an axial stiffness of 6032.21 N/m and a transverse stiffness of 6.29 N/m. The finite element analysis results show that the sensitivity of the accelerometer is 59.1 Hz/g (Y-axis) and 59 Hz/g (X-axis). Cross-axis sensitivity is 0.508% (Y-axis) and 0.339% (X-axis), which is significantly lower than most resonant accelerometers. The coupling structure and optimization method proposed in this paper provide a new solution for designing resonant accelerometers with high interference immunity and low cross-axis sensitivity.
RESUMO
With the continuous progress of aerospace, military technology, and marine development, the MEMS resonance pressure sensor puts forward the requirements of not only a wide range but also high sensitivity. However, traditional resonators are hardly compatible with both. In response, we propose a new sensor structure. By arranging the resonant beam and the sensitive diaphragm vertically in space, the new structure improves the rigidity of the diaphragm without changing the thickness of the diaphragm and achieves the purpose of increasing the range without affecting the sensitivity. To find the optimal structural parameters for the sensor sensitivity and range, and to prevent the effects of modal disturbances, we propose a multi-objective optimization design scheme based on the BP and NSGA-II algorithms. The optimization of the structure parameters not only improved the sensitivity but also increased the interference frequency to solve the issue of mode interference. The optimized structure achieves a sensitivity and range of 4.23 Hz/kPa and 1-10 MPa, respectively. Its linear influence factor is 38.07, significantly higher than that of most resonant pressure sensors. The structural and algorithmic optimizations proposed in this paper provide a new method for designing resonant pressure sensors compatible with a wide range and high sensitivity.
RESUMO
In this paper, Mn2+/Ln3+-doped hexagonal phase (ß-) NaGdF4:Ce (Ln = Tb, Dy, Eu) nanomaterials with subtly tuned multicolor output have been successfully synthesized by a typical simple hydrothermal method using polyethylene glycol (PEG) as a surface modifying agent. The crystal structures, morphology, luminescence performance, and energy transfer (ET) mechanism of the synthesized NaGdF4 nanoparticles (NPs) were investigated in detail. It is found that due to the effective ET between Ce3+ and Mn2+/Ln3+, the multicolor down-conversion (DC) emission phosphors can yield three major emission bands in the visible region including blue, green and red. Moreover, the white emission could be realized through manipulating the doping ratio of Ce3+, Dy3+ and Eu3+ with suitable concentration in ß-NaGdF4 NPs through effective resonance-type ET under the irradiation of 273 nm. And the corresponding CIE1931 coordinates were calculated to be (0.31, 0.32), which is near the normative white emission (0.33, 0.33). All the multicolor tuning and white emission results evidently suggest that the present Ce3+ and Mn2+/Ln3+-doped ß-NaGdF4 NPs are feasible phosphors for potential applications in white-light emitters, full-color displays and photonic devices.