Depth-selective structural analysis of thin films using total-external-reflection x-ray diffraction.
J Phys Condens Matter
; 22(47): 474009, 2010 Dec 01.
Article
em En
| MEDLINE
| ID: mdl-21386616
ABSTRACT
Total-external-reflection (TER) x-ray diffraction is the depth-sensitive technique for evaluating layered structures, including epitaxial heterostructures, ion-doped bulk crystals and several quantum-well structures. This technique can control the depth of observation by changing both incident and exit angles of x-rays from the surface. In this review, the principle of the TER technique and measurement apparatus are briefly described, and applications of layered-semiconductor samples evaluated using the TER technique are introduced.
Texto completo:
1
Base de dados:
MEDLINE
Assunto principal:
Difração de Raios X
/
Algoritmos
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Teste de Materiais
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Difração de Nêutrons
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Membranas Artificiais
Idioma:
En
Revista:
J Phys Condens Matter
Assunto da revista:
BIOFISICA
Ano de publicação:
2010
Tipo de documento:
Article
País de afiliação:
Japão