Hybrid Si-LiNbO3 microring electro-optically tunable resonators for active photonic devices.
Opt Lett
; 36(7): 1119-21, 2011 Apr 01.
Article
em En
| MEDLINE
| ID: mdl-21479002
Hybrid Si-LiNbO3 electro-optic tunable ring resonators have been proposed and demonstrated as a path to achieving ultracompact and high-speed electro-optic devices. Free standing single crystal LiNbO3 microplatelets (~mm long and ~1 µm thick) were obtained from a z-cut LiNbO3 substrate by ion implantation and thermal treatment. The platelets were transferred and thermally bonded on top of Si resonators that were fabricated in a Si-on-insulator platform by a 0.18 µm standard complementary metal-oxide-semiconductor process. For the hybrid microring resonator, a free spectral range of 16.5 nm, a finesse F of ~1.67 × 10², a Q-factor of ~1.68 × 104, and an effective r coefficient of ~1.7 pm/V were achieved for the TE mode. These values are in good agreement with the calculated results.
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Base de dados:
MEDLINE
Idioma:
En
Revista:
Opt Lett
Ano de publicação:
2011
Tipo de documento:
Article
País de afiliação:
Estados Unidos