Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control.
Opt Express
; 21(3): 2807-15, 2013 Feb 11.
Article
em En
| MEDLINE
| ID: mdl-23481737
ABSTRACT
We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <π/100 mirror phase accuracy and far field beam steering is shown. Stroboscopic measurement capabilities are demonstrated which allow us to show feedforward control to eliminate micromirror ringing.
Texto completo:
1
Base de dados:
MEDLINE
Assunto principal:
Algoritmos
/
Sistemas Microeletromecânicos
/
Interferometria
/
Lentes
Idioma:
En
Revista:
Opt Express
Assunto da revista:
OFTALMOLOGIA
Ano de publicação:
2013
Tipo de documento:
Article
País de afiliação:
Estados Unidos