Model-based defect detection on structured surfaces having optically unresolved features.
Appl Opt
; 54(30): 8872-7, 2015 Oct 20.
Article
em En
| MEDLINE
| ID: mdl-26560373
ABSTRACT
In this paper, we demonstrate, both numerically and experimentally, a method for the detection of defects on structured surfaces having optically unresolved features. The method makes use of synthetic reference data generated by an observational model that is able to simulate the response of the selected optical inspection system to the ideal structure, thereby providing an ideal measure of deviation from nominal geometry. The method addresses the high dynamic range challenge faced in highly parallel manufacturing by enabling the use of low resolution, wide field of view optical systems for defect detection on surfaces containing small features over large regions.
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1
Base de dados:
MEDLINE
Tipo de estudo:
Diagnostic_studies
Idioma:
En
Revista:
Appl Opt
Ano de publicação:
2015
Tipo de documento:
Article