Resonance-domain diffractive microlens arrays.

High-efficiency resonance-domain diffractive microlens arrays with high numerical apertures and 100% fill factor were designed, fabricated, and characterized. Fabricated arrays of eight off-axis microlenses with pitch 127 µm and numerical aperture 0.2 demonstrated diffraction-limited collimation of fiber light at 632.8 nm wavelength. Optical measurements revealed diffraction efficiency exceeding 93%, in match to numerical calculations with rigorous conical diffraction. The resonance-domain diffractive microlens arrays are highly suitable for applications in fiber optics, multispot optical tweezers, optical sensors, and spectrometry.