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Flow sensor based on the snap-through detection of a curved micromechanical beam.
Kessler, Yoav; Ilic, B Robert; Krylov, Slava; Liberzon, Alex.
Afiliação
  • Kessler Y; School of Mechanical Engineering, Tel Aviv University, Tel Aviv 6997801, Israel.
  • Ilic BR; National Institute of Standards and Technology, Gaithersburg, MD 20899 USA.
  • Krylov S; School of Mechanical Engineering, Tel Aviv University, Tel Aviv 6997801, Israel.
  • Liberzon A; School of Mechanical Engineering, Tel Aviv University, Tel Aviv 6997801, Israel.
J Microelectromech Syst ; 272018.
Article em En | MEDLINE | ID: mdl-31274970
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Texto completo: 1 Base de dados: MEDLINE Tipo de estudo: Diagnostic_studies / Prognostic_studies Idioma: En Revista: J Microelectromech Syst Ano de publicação: 2018 Tipo de documento: Article País de afiliação: Israel
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Base de dados: MEDLINE Tipo de estudo: Diagnostic_studies / Prognostic_studies Idioma: En Revista: J Microelectromech Syst Ano de publicação: 2018 Tipo de documento: Article País de afiliação: Israel