A Digital Closed-Loop Sense MEMS Disk Resonator Gyroscope Circuit Design Based on Integrated Analog Front-end.

Wang, Yihang; Fu, Qiang; Zhang, Yufeng; Zhang, Wenbo; Chen, Dongliang; Yin, Liang; Liu, Xiaowei

Wang, Yihang; Fu, Qiang; Zhang, Yufeng; Zhang, Wenbo; Chen, Dongliang; Yin, Liang; Liu, Xiaowei.

Afiliação

Wang Y; MEMS center, Harbin Institute of Technology, Harbin 150001, China.
Fu Q; MEMS center, Harbin Institute of Technology, Harbin 150001, China.
Zhang Y; Key Laboratory of Micro-structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China.
Zhang W; MEMS center, Harbin Institute of Technology, Harbin 150001, China.
Chen D; Key Laboratory of Micro-structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China.
Yin L; MEMS center, Harbin Institute of Technology, Harbin 150001, China.
Liu X; MEMS center, Harbin Institute of Technology, Harbin 150001, China.

Sensors (Basel) ; 20(3)2020 Jan 27.

Article em En | MEDLINE | ID: mdl-32012671

Palavras-chave

MEMS; digital control loop; disk resonator gyroscope (DRG)

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Texto completo: 1 Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Revista: Sensors (Basel) Ano de publicação: 2020 Tipo de documento: Article País de afiliação: China

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