Optical Emission Imaging and Modeling Investigations of Microwave-Activated SiH4/H2 and SiH4/CH4/H2 Plasmas.

Mahoney, Edward J D; Lalji, Alim K S K; Allden, John W R; Truscott, Benjamin S; Ashfold, Michael N R; Mankelevich, Yuri A

Optical Emission Imaging and Modeling Investigations of Microwave-Activated SiH₄/H₂ and SiH₄/CH₄/H₂ Plasmas.

Mahoney, Edward J D; Lalji, Alim K S K; Allden, John W R; Truscott, Benjamin S; Ashfold, Michael N R; Mankelevich, Yuri A.

Afiliação

Mahoney EJD; School of Chemistry, University of Bristol, Bristol BS8 1TS, U.K.
Lalji AKSK; Centre for Doctoral Training in Diamond Science and Technology, University of Warwick, Gibbet Hill Road, Coventry CV4 7AL, U.K.
Allden JWR; School of Chemistry, University of Bristol, Bristol BS8 1TS, U.K.
Truscott BS; School of Chemistry, University of Bristol, Bristol BS8 1TS, U.K.
Ashfold MNR; Element Six Ltd., Global Innovation Centre, Fermi Avenue, Didcot OX11 0QR, U.K.
Mankelevich YA; School of Chemistry, University of Bristol, Bristol BS8 1TS, U.K.

J Phys Chem A ; 124(25): 5109-5128, 2020 Jun 25.

Article em En | MEDLINE | ID: mdl-32475115

Texto completo

Imprimir

XML

PubMed Links

Buscar no Google

Texto completo: 1 Base de dados: MEDLINE Idioma: En Revista: J Phys Chem A Assunto da revista: QUIMICA Ano de publicação: 2020 Tipo de documento: Article País de afiliação: Reino Unido

Texto completo

Imprimir

XML

PubMed Links

Buscar no Google