A Demodulation Algorithm for Periodically In-Plane Vibrating MEMS Based on a Stroboscopic Micro-Visual System.

Yu, Minhui; Sang, Mei; Guo, Cheng; Zhang, Ruifeng; Zhao, Fan; Liu, Hongguang; Liu, Tiegen

Yu, Minhui; Sang, Mei; Guo, Cheng; Zhang, Ruifeng; Zhao, Fan; Liu, Hongguang; Liu, Tiegen.

Afiliação

Yu M; School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin300072, China.
Sang M; Key Laboratory of Opto-Electronics Information Technology (Tianjin University), Ministry of Education, Tianjin300072, China.
Guo C; School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin300072, China.
Zhang R; Key Laboratory of Opto-Electronics Information Technology (Tianjin University), Ministry of Education, Tianjin300072, China.
Zhao F; Department of Electrical Engineering, University of Texas at Arlington, Arlington, TX, USA.
Liu H; School of Micro-electronics, Tianjin University, Tianjin300072, China.
Liu T; School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin300072, China.

Microsc Microanal ; 28(1): 145-151, 2022 Feb.

Article em En | MEDLINE | ID: mdl-35177142

Palavras-chave

MEMS; in-plane vibration measurement; speeded-up robust features; ultrafast stroboscopic micro-visual system

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Texto completo: 1 Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Revista: Microsc Microanal Ano de publicação: 2022 Tipo de documento: Article País de afiliação: China

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